7/15/2011	8:53:25 AM	Main Vac valve closed
7/15/2011	8:53:36 AM	Main Vac valve opened
7/15/2011	8:53:47 AM	Recipe started at 8:53 AM
7/15/2011	8:53:47 AM	Helium valve closed
7/15/2011	8:53:47 AM	H2 valve closed
7/15/2011	8:53:47 AM	BCl3 valve closed
7/15/2011	8:53:47 AM	PH3 valve closed
7/15/2011	8:53:47 AM	SiCl4 pre valve closed
7/15/2011	8:53:47 AM	SiCl4 post valve closed
7/15/2011	8:53:47 AM	Main Vac valve closed
7/15/2011	8:53:47 AM	Bypass valve closed
7/15/2011	8:53:47 AM	Bubbler valve closed
7/15/2011	8:53:47 AM	Helium MFC set to  0.000000
7/15/2011	8:53:47 AM	H2 MFC set to  0.000000
7/15/2011	8:53:47 AM	BCl3 MFC set to  0.000000
7/15/2011	8:53:47 AM	PHl3 MFC set to  0.000000
7/15/2011	8:53:47 AM	SiCl4 MFC set to  0.000000
7/15/2011	8:53:47 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:53:47 AM	Tube furnace set to 0
7/15/2011	8:53:50 AM	Helium valve closed
7/15/2011	8:53:50 AM	BCl3 valve closed
7/15/2011	8:53:50 AM	PH3 valve closed
7/15/2011	8:53:50 AM	SiCl4 pre valve closed
7/15/2011	8:53:50 AM	SiCl4 post valve closed
7/15/2011	8:53:50 AM	Main Vac valve closed
7/15/2011	8:53:50 AM	Bypass valve closed
7/15/2011	8:53:50 AM	Bubbler valve closed
7/15/2011	8:53:50 AM	H2 valve opened
7/15/2011	8:53:50 AM	Helium MFC set to  0.000000
7/15/2011	8:53:50 AM	H2 MFC set to  500.000000
7/15/2011	8:53:50 AM	BCl3 MFC set to  0.000000
7/15/2011	8:53:50 AM	PHl3 MFC set to  0.000000
7/15/2011	8:53:50 AM	SiCl4 MFC set to  0.000000
7/15/2011	8:53:50 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:53:50 AM	Tube furnace set to 0
7/15/2011	8:54:56 AM	Helium valve closed
7/15/2011	8:54:56 AM	BCl3 valve closed
7/15/2011	8:54:56 AM	PH3 valve closed
7/15/2011	8:54:56 AM	SiCl4 pre valve closed
7/15/2011	8:54:56 AM	SiCl4 post valve closed
7/15/2011	8:54:56 AM	Main Vac valve closed
7/15/2011	8:54:56 AM	Bypass valve closed
7/15/2011	8:54:56 AM	H2 valve opened
7/15/2011	8:54:56 AM	Bubbler valve opened
7/15/2011	8:54:56 AM	Helium MFC set to  0.000000
7/15/2011	8:54:56 AM	H2 MFC set to  500.000000
7/15/2011	8:54:56 AM	BCl3 MFC set to  0.000000
7/15/2011	8:54:56 AM	PHl3 MFC set to  0.000000
7/15/2011	8:54:56 AM	SiCl4 MFC set to  0.000000
7/15/2011	8:54:56 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:54:57 AM	Tube furnace set to 0
7/15/2011	8:54:58 AM	Helium valve closed
7/15/2011	8:54:58 AM	BCl3 valve closed
7/15/2011	8:54:58 AM	PH3 valve closed
7/15/2011	8:54:58 AM	SiCl4 pre valve closed
7/15/2011	8:54:58 AM	SiCl4 post valve closed
7/15/2011	8:54:58 AM	Main Vac valve closed
7/15/2011	8:54:58 AM	Bypass valve closed
7/15/2011	8:54:58 AM	H2 valve opened
7/15/2011	8:54:58 AM	Bubbler valve opened
7/15/2011	8:54:58 AM	Helium MFC set to  0.000000
7/15/2011	8:54:58 AM	H2 MFC set to  500.000000
7/15/2011	8:54:58 AM	BCl3 MFC set to  0.000000
7/15/2011	8:54:58 AM	PHl3 MFC set to  0.000000
7/15/2011	8:54:58 AM	SiCl4 MFC set to  0.000000
7/15/2011	8:54:58 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:54:58 AM	Tube furnace set to 1000
7/15/2011	9:14:58 AM	Helium valve closed
7/15/2011	9:14:58 AM	PH3 valve closed
7/15/2011	9:14:58 AM	Main Vac valve closed
7/15/2011	9:14:58 AM	Bypass valve closed
7/15/2011	9:14:58 AM	H2 valve opened
7/15/2011	9:14:58 AM	BCl3 valve opened
7/15/2011	9:14:58 AM	SiCl4 pre valve opened
7/15/2011	9:14:58 AM	SiCl4 post valve opened
7/15/2011	9:14:58 AM	Bubbler valve opened
7/15/2011	9:14:58 AM	Helium MFC set to  0.000000
7/15/2011	9:14:58 AM	H2 MFC set to  500.000000
7/15/2011	9:14:58 AM	BCl3 MFC set to  8.000000
7/15/2011	9:14:58 AM	PHl3 MFC set to  0.000000
7/15/2011	9:14:58 AM	SiCl4 MFC set to  50.000000
7/15/2011	9:14:58 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:14:58 AM	Tube furnace set to 1000
7/15/2011	9:34:58 AM	Helium valve closed
7/15/2011	9:34:58 AM	BCl3 valve closed
7/15/2011	9:34:58 AM	PH3 valve closed
7/15/2011	9:34:58 AM	SiCl4 pre valve closed
7/15/2011	9:34:58 AM	SiCl4 post valve closed
7/15/2011	9:34:58 AM	Main Vac valve closed
7/15/2011	9:34:58 AM	Bypass valve closed
7/15/2011	9:34:58 AM	H2 valve opened
7/15/2011	9:34:58 AM	Bubbler valve opened
7/15/2011	9:34:58 AM	Helium MFC set to  0.000000
7/15/2011	9:34:58 AM	H2 MFC set to  500.000000
7/15/2011	9:34:58 AM	BCl3 MFC set to  0.000000
7/15/2011	9:34:58 AM	PHl3 MFC set to  0.000000
7/15/2011	9:34:58 AM	SiCl4 MFC set to  0.000000
7/15/2011	9:34:58 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:34:58 AM	Tube furnace set to 950
7/15/2011	9:37:58 AM	H2 valve closed
7/15/2011	9:37:58 AM	BCl3 valve closed
7/15/2011	9:37:58 AM	PH3 valve closed
7/15/2011	9:37:58 AM	SiCl4 pre valve closed
7/15/2011	9:37:58 AM	SiCl4 post valve closed
7/15/2011	9:37:58 AM	Main Vac valve closed
7/15/2011	9:37:58 AM	Bypass valve closed
7/15/2011	9:37:58 AM	Helium valve opened
7/15/2011	9:37:58 AM	Bubbler valve opened
7/15/2011	9:37:58 AM	Helium MFC set to  500.000000
7/15/2011	9:37:58 AM	H2 MFC set to  0.000000
7/15/2011	9:37:58 AM	BCl3 MFC set to  0.000000
7/15/2011	9:37:58 AM	PHl3 MFC set to  0.000000
7/15/2011	9:37:58 AM	SiCl4 MFC set to  0.000000
7/15/2011	9:37:58 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:37:58 AM	Tube furnace set to 900
7/15/2011	9:40:58 AM	H2 valve closed
7/15/2011	9:40:58 AM	BCl3 valve closed
7/15/2011	9:40:58 AM	PH3 valve closed
7/15/2011	9:40:58 AM	SiCl4 pre valve closed
7/15/2011	9:40:58 AM	SiCl4 post valve closed
7/15/2011	9:40:58 AM	Main Vac valve closed
7/15/2011	9:40:58 AM	Bypass valve closed
7/15/2011	9:40:58 AM	Helium valve opened
7/15/2011	9:40:58 AM	Bubbler valve opened
7/15/2011	9:40:58 AM	Helium MFC set to  500.000000
7/15/2011	9:40:58 AM	H2 MFC set to  0.000000
7/15/2011	9:40:58 AM	BCl3 MFC set to  0.000000
7/15/2011	9:40:58 AM	PHl3 MFC set to  0.000000
7/15/2011	9:40:58 AM	SiCl4 MFC set to  0.000000
7/15/2011	9:40:58 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:40:59 AM	Tube furnace set to 850
7/15/2011	9:43:59 AM	H2 valve closed
7/15/2011	9:43:59 AM	BCl3 valve closed
7/15/2011	9:43:59 AM	PH3 valve closed
7/15/2011	9:43:59 AM	SiCl4 pre valve closed
7/15/2011	9:43:59 AM	SiCl4 post valve closed
7/15/2011	9:43:59 AM	Main Vac valve closed
7/15/2011	9:43:59 AM	Bypass valve closed
7/15/2011	9:43:59 AM	Helium valve opened
7/15/2011	9:43:59 AM	Bubbler valve opened
7/15/2011	9:43:59 AM	Helium MFC set to  500.000000
7/15/2011	9:43:59 AM	H2 MFC set to  0.000000
7/15/2011	9:43:59 AM	BCl3 MFC set to  0.000000
7/15/2011	9:43:59 AM	PHl3 MFC set to  0.000000
7/15/2011	9:43:59 AM	SiCl4 MFC set to  0.000000
7/15/2011	9:43:59 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:43:59 AM	Tube furnace set to 800
7/15/2011	9:46:59 AM	H2 valve closed
7/15/2011	9:46:59 AM	BCl3 valve closed
7/15/2011	9:46:59 AM	PH3 valve closed
7/15/2011	9:46:59 AM	SiCl4 pre valve closed
7/15/2011	9:46:59 AM	SiCl4 post valve closed
7/15/2011	9:46:59 AM	Main Vac valve closed
7/15/2011	9:46:59 AM	Bypass valve closed
7/15/2011	9:46:59 AM	Helium valve opened
7/15/2011	9:46:59 AM	Bubbler valve opened
7/15/2011	9:46:59 AM	Helium MFC set to  500.000000
7/15/2011	9:46:59 AM	H2 MFC set to  0.000000
7/15/2011	9:46:59 AM	BCl3 MFC set to  0.000000
7/15/2011	9:46:59 AM	PHl3 MFC set to  0.000000
7/15/2011	9:46:59 AM	SiCl4 MFC set to  0.000000
7/15/2011	9:46:59 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:46:59 AM	Tube furnace set to 750
7/15/2011	9:49:59 AM	H2 valve closed
7/15/2011	9:49:59 AM	BCl3 valve closed
7/15/2011	9:49:59 AM	PH3 valve closed
7/15/2011	9:49:59 AM	SiCl4 pre valve closed
7/15/2011	9:49:59 AM	SiCl4 post valve closed
7/15/2011	9:49:59 AM	Main Vac valve closed
7/15/2011	9:49:59 AM	Bypass valve closed
7/15/2011	9:49:59 AM	Helium valve opened
7/15/2011	9:49:59 AM	Bubbler valve opened
7/15/2011	9:49:59 AM	Helium MFC set to  500.000000
7/15/2011	9:49:59 AM	H2 MFC set to  0.000000
7/15/2011	9:49:59 AM	BCl3 MFC set to  0.000000
7/15/2011	9:49:59 AM	PHl3 MFC set to  0.000000
7/15/2011	9:49:59 AM	SiCl4 MFC set to  0.000000
7/15/2011	9:49:59 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:49:59 AM	Tube furnace set to 0
7/15/2011	10:09:59 AM	Helium valve closed
7/15/2011	10:09:59 AM	H2 valve closed
7/15/2011	10:09:59 AM	BCl3 valve closed
7/15/2011	10:09:59 AM	PH3 valve closed
7/15/2011	10:09:59 AM	SiCl4 pre valve closed
7/15/2011	10:09:59 AM	SiCl4 post valve closed
7/15/2011	10:09:59 AM	Main Vac valve closed
7/15/2011	10:09:59 AM	Bypass valve closed
7/15/2011	10:09:59 AM	Bubbler valve closed
7/15/2011	10:09:59 AM	Helium MFC set to  0.000000
7/15/2011	10:09:59 AM	H2 MFC set to  0.000000
7/15/2011	10:09:59 AM	BCl3 MFC set to  0.000000
7/15/2011	10:09:59 AM	PHl3 MFC set to  0.000000
7/15/2011	10:09:59 AM	SiCl4 MFC set to  0.000000
7/15/2011	10:09:59 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:09:59 AM	Tube furnace set to 0
7/15/2011	10:10:00 AM	Run finished at 10:10 AM
7/15/2011	10:51:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	10:51:46 AM	Recipe started at 10:51 AM
7/15/2011	10:51:46 AM	Helium valve closed
7/15/2011	10:51:46 AM	H2 valve closed
7/15/2011	10:51:46 AM	BCl3 valve closed
7/15/2011	10:51:46 AM	PH3 valve closed
7/15/2011	10:51:46 AM	SiCl4 pre valve closed
7/15/2011	10:51:46 AM	SiCl4 post valve closed
7/15/2011	10:51:46 AM	Main Vac valve closed
7/15/2011	10:51:46 AM	Bypass valve closed
7/15/2011	10:51:46 AM	Bubbler valve closed
7/15/2011	10:51:46 AM	Helium MFC set to  0.000000
7/15/2011	10:51:46 AM	H2 MFC set to  0.000000
7/15/2011	10:51:46 AM	BCl3 MFC set to  0.000000
7/15/2011	10:51:46 AM	PHl3 MFC set to  0.000000
7/15/2011	10:51:46 AM	SiCl4 MFC set to  0.000000
7/15/2011	10:51:46 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:51:46 AM	Tube furnace set to 0
7/15/2011	10:51:49 AM	H2 valve closed
7/15/2011	10:51:49 AM	BCl3 valve closed
7/15/2011	10:51:49 AM	PH3 valve closed
7/15/2011	10:51:49 AM	SiCl4 pre valve closed
7/15/2011	10:51:49 AM	SiCl4 post valve closed
7/15/2011	10:51:49 AM	Main Vac valve closed
7/15/2011	10:51:49 AM	Bypass valve closed
7/15/2011	10:51:49 AM	Bubbler valve closed
7/15/2011	10:51:49 AM	Helium valve opened
7/15/2011	10:51:49 AM	Helium MFC set to  500.000000
7/15/2011	10:51:49 AM	H2 MFC set to  0.000000
7/15/2011	10:51:49 AM	BCl3 MFC set to  0.000000
7/15/2011	10:51:49 AM	PHl3 MFC set to  0.000000
7/15/2011	10:51:49 AM	SiCl4 MFC set to  0.000000
7/15/2011	10:51:49 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:51:49 AM	Tube furnace set to 0
7/15/2011	10:51:51 AM	Helium valve closed
7/15/2011	10:51:51 AM	H2 valve closed
7/15/2011	10:51:51 AM	BCl3 valve closed
7/15/2011	10:51:51 AM	PH3 valve closed
7/15/2011	10:51:51 AM	SiCl4 pre valve closed
7/15/2011	10:51:51 AM	SiCl4 post valve closed
7/15/2011	10:51:51 AM	Main Vac valve closed
7/15/2011	10:51:51 AM	Bypass valve closed
7/15/2011	10:51:51 AM	Bubbler valve closed
7/15/2011	10:51:51 AM	Helium MFC set to  0.000000
7/15/2011	10:51:51 AM	H2 MFC set to  0.000000
7/15/2011	10:51:51 AM	BCl3 MFC set to  0.000000
7/15/2011	10:51:51 AM	PHl3 MFC set to  0.000000
7/15/2011	10:51:51 AM	SiCl4 MFC set to  0.000000
7/15/2011	10:51:51 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:51:51 AM	Tube furnace set to 0
7/15/2011	10:51:52 AM	Run finished at 10:51 AM
7/15/2011	10:51:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	11:08:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	11:08:42 AM	Recipe started at 11:08 AM
7/15/2011	11:08:42 AM	Helium valve closed
7/15/2011	11:08:42 AM	H2 valve closed
7/15/2011	11:08:42 AM	BCl3 valve closed
7/15/2011	11:08:42 AM	PH3 valve closed
7/15/2011	11:08:42 AM	SiCl4 pre valve closed
7/15/2011	11:08:42 AM	SiCl4 post valve closed
7/15/2011	11:08:42 AM	Main Vac valve closed
7/15/2011	11:08:42 AM	Bubbler valve closed
7/15/2011	11:08:42 AM	Bypass valve opened
7/15/2011	11:08:42 AM	Helium MFC set to  0.000000
7/15/2011	11:08:42 AM	H2 MFC set to  0.000000
7/15/2011	11:08:42 AM	BCl3 MFC set to  0.000000
7/15/2011	11:08:42 AM	PHl3 MFC set to  0.000000
7/15/2011	11:08:42 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:08:42 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:08:42 AM	Tube furnace set to 0
7/15/2011	11:09:03 AM	Run aborted at 11:09 AM
7/15/2011	11:09:03 AM	Helium valve closed
7/15/2011	11:09:03 AM	H2 valve closed
7/15/2011	11:09:03 AM	BCl3 valve closed
7/15/2011	11:09:03 AM	PH3 valve closed
7/15/2011	11:09:03 AM	SiCl4 pre valve closed
7/15/2011	11:09:03 AM	SiCl4 post valve closed
7/15/2011	11:09:03 AM	Bypass valve closed
7/15/2011	11:09:03 AM	Main Vac valve closed
7/15/2011	11:09:03 AM	Bubbler valve closed
7/15/2011	11:09:03 AM	Helium MFC set to  0.000000
7/15/2011	11:09:03 AM	H2 MFC set to  0.000000
7/15/2011	11:09:03 AM	BCl3 MFC set to  0.000000
7/15/2011	11:09:03 AM	PHl3 MFC set to  0.000000
7/15/2011	11:09:03 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:09:03 AM	Tube furnace set to 0
7/15/2011	11:09:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	11:10:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	11:10:23 AM	Recipe started at 11:10 AM
7/15/2011	11:10:23 AM	Helium valve closed
7/15/2011	11:10:23 AM	H2 valve closed
7/15/2011	11:10:23 AM	BCl3 valve closed
7/15/2011	11:10:23 AM	PH3 valve closed
7/15/2011	11:10:23 AM	SiCl4 pre valve closed
7/15/2011	11:10:23 AM	SiCl4 post valve closed
7/15/2011	11:10:23 AM	Main Vac valve closed
7/15/2011	11:10:23 AM	Bubbler valve closed
7/15/2011	11:10:23 AM	Bypass valve opened
7/15/2011	11:10:23 AM	Helium MFC set to  0.000000
7/15/2011	11:10:23 AM	H2 MFC set to  0.000000
7/15/2011	11:10:23 AM	BCl3 MFC set to  0.000000
7/15/2011	11:10:23 AM	PHl3 MFC set to  0.000000
7/15/2011	11:10:23 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:10:23 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:10:23 AM	Tube furnace set to 0
7/15/2011	11:11:07 AM	Helium valve closed
7/15/2011	11:11:07 AM	H2 valve closed
7/15/2011	11:11:07 AM	BCl3 valve closed
7/15/2011	11:11:07 AM	PH3 valve closed
7/15/2011	11:11:07 AM	SiCl4 pre valve closed
7/15/2011	11:11:07 AM	SiCl4 post valve closed
7/15/2011	11:11:07 AM	Main Vac valve closed
7/15/2011	11:11:07 AM	Bubbler valve closed
7/15/2011	11:11:07 AM	Bypass valve opened
7/15/2011	11:11:07 AM	Helium MFC set to  0.000000
7/15/2011	11:11:07 AM	H2 MFC set to  0.000000
7/15/2011	11:11:07 AM	BCl3 MFC set to  0.000000
7/15/2011	11:11:07 AM	PHl3 MFC set to  0.000000
7/15/2011	11:11:07 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:11:07 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:11:07 AM	Tube furnace set to 0
7/15/2011	11:12:07 AM	Helium valve closed
7/15/2011	11:12:07 AM	H2 valve closed
7/15/2011	11:12:07 AM	BCl3 valve closed
7/15/2011	11:12:07 AM	PH3 valve closed
7/15/2011	11:12:07 AM	SiCl4 pre valve closed
7/15/2011	11:12:07 AM	SiCl4 post valve closed
7/15/2011	11:12:07 AM	Bypass valve closed
7/15/2011	11:12:07 AM	Bubbler valve closed
7/15/2011	11:12:07 AM	Main Vac valve opened
7/15/2011	11:12:07 AM	Helium MFC set to  0.000000
7/15/2011	11:12:07 AM	H2 MFC set to  0.000000
7/15/2011	11:12:07 AM	BCl3 MFC set to  0.000000
7/15/2011	11:12:07 AM	PHl3 MFC set to  0.000000
7/15/2011	11:12:07 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:12:07 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:12:07 AM	Tube furnace set to 0
7/15/2011	11:12:08 AM	Run finished at 11:12 AM
7/15/2011	11:12:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	11:31:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/15/2011	11:31:20 AM	Recipe started at 11:31 AM
7/15/2011	11:31:20 AM	Helium valve closed
7/15/2011	11:31:20 AM	H2 valve closed
7/15/2011	11:31:20 AM	BCl3 valve closed
7/15/2011	11:31:20 AM	PH3 valve closed
7/15/2011	11:31:20 AM	SiCl4 pre valve closed
7/15/2011	11:31:20 AM	SiCl4 post valve closed
7/15/2011	11:31:20 AM	Main Vac valve closed
7/15/2011	11:31:20 AM	Bypass valve closed
7/15/2011	11:31:20 AM	Bubbler valve closed
7/15/2011	11:31:20 AM	Helium MFC set to  0.000000
7/15/2011	11:31:20 AM	H2 MFC set to  0.000000
7/15/2011	11:31:20 AM	BCl3 MFC set to  0.000000
7/15/2011	11:31:20 AM	PHl3 MFC set to  0.000000
7/15/2011	11:31:20 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:31:20 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:31:20 AM	Tube furnace set to 0
7/15/2011	11:31:20 AM	Run finished at 11:31 AM
7/15/2011	11:31:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/15/2011	11:31:52 AM	Main Vac valve opened
7/15/2011	11:33:51 AM	Main Vac valve closed
7/15/2011	11:33:54 AM	Main Vac valve opened
7/15/2011	11:34:19 AM	Helium MFC set to  20.000000
7/15/2011	11:34:21 AM	Helium valve opened
7/15/2011	11:36:00 AM	Helium valve closed
7/15/2011	11:37:22 AM	Main Vac valve closed
7/15/2011	11:37:39 AM	Main Vac valve opened
7/15/2011	11:39:47 AM	Recipe started at 11:39 AM
7/15/2011	11:39:47 AM	Helium valve closed
7/15/2011	11:39:47 AM	H2 valve closed
7/15/2011	11:39:47 AM	BCl3 valve closed
7/15/2011	11:39:47 AM	PH3 valve closed
7/15/2011	11:39:47 AM	SiCl4 pre valve closed
7/15/2011	11:39:47 AM	SiCl4 post valve closed
7/15/2011	11:39:47 AM	Main Vac valve closed
7/15/2011	11:39:47 AM	Bypass valve closed
7/15/2011	11:39:47 AM	Bubbler valve closed
7/15/2011	11:39:47 AM	Helium MFC set to  0.000000
7/15/2011	11:39:47 AM	H2 MFC set to  0.000000
7/15/2011	11:39:47 AM	BCl3 MFC set to  0.000000
7/15/2011	11:39:47 AM	PHl3 MFC set to  0.000000
7/15/2011	11:39:47 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:39:47 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:39:47 AM	Tube furnace set to 0
7/15/2011	11:39:50 AM	Helium valve closed
7/15/2011	11:39:50 AM	BCl3 valve closed
7/15/2011	11:39:50 AM	PH3 valve closed
7/15/2011	11:39:50 AM	SiCl4 pre valve closed
7/15/2011	11:39:50 AM	SiCl4 post valve closed
7/15/2011	11:39:50 AM	Main Vac valve closed
7/15/2011	11:39:50 AM	Bypass valve closed
7/15/2011	11:39:50 AM	Bubbler valve closed
7/15/2011	11:39:50 AM	H2 valve opened
7/15/2011	11:39:50 AM	Helium MFC set to  0.000000
7/15/2011	11:39:50 AM	H2 MFC set to  500.000000
7/15/2011	11:39:50 AM	BCl3 MFC set to  0.000000
7/15/2011	11:39:50 AM	PHl3 MFC set to  0.000000
7/15/2011	11:39:50 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:39:50 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:39:51 AM	Tube furnace set to 0
7/15/2011	11:40:56 AM	Helium valve closed
7/15/2011	11:40:56 AM	BCl3 valve closed
7/15/2011	11:40:56 AM	PH3 valve closed
7/15/2011	11:40:56 AM	SiCl4 pre valve closed
7/15/2011	11:40:56 AM	SiCl4 post valve closed
7/15/2011	11:40:56 AM	Main Vac valve closed
7/15/2011	11:40:56 AM	Bypass valve closed
7/15/2011	11:40:56 AM	H2 valve opened
7/15/2011	11:40:56 AM	Bubbler valve opened
7/15/2011	11:40:56 AM	Helium MFC set to  0.000000
7/15/2011	11:40:56 AM	H2 MFC set to  500.000000
7/15/2011	11:40:56 AM	BCl3 MFC set to  0.000000
7/15/2011	11:40:56 AM	PHl3 MFC set to  0.000000
7/15/2011	11:40:56 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:40:56 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:40:56 AM	Tube furnace set to 0
7/15/2011	11:40:57 AM	Helium valve closed
7/15/2011	11:40:57 AM	BCl3 valve closed
7/15/2011	11:40:57 AM	PH3 valve closed
7/15/2011	11:40:57 AM	SiCl4 pre valve closed
7/15/2011	11:40:57 AM	SiCl4 post valve closed
7/15/2011	11:40:57 AM	Main Vac valve closed
7/15/2011	11:40:57 AM	Bypass valve closed
7/15/2011	11:40:57 AM	H2 valve opened
7/15/2011	11:40:57 AM	Bubbler valve opened
7/15/2011	11:40:57 AM	Helium MFC set to  0.000000
7/15/2011	11:40:57 AM	H2 MFC set to  500.000000
7/15/2011	11:40:57 AM	BCl3 MFC set to  0.000000
7/15/2011	11:40:57 AM	PHl3 MFC set to  0.000000
7/15/2011	11:40:57 AM	SiCl4 MFC set to  0.000000
7/15/2011	11:40:57 AM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:40:57 AM	Tube furnace set to 1000
7/15/2011	12:00:57 PM	Helium valve closed
7/15/2011	12:00:57 PM	BCl3 valve closed
7/15/2011	12:00:57 PM	Main Vac valve closed
7/15/2011	12:00:57 PM	Bypass valve closed
7/15/2011	12:00:57 PM	H2 valve opened
7/15/2011	12:00:57 PM	PH3 valve opened
7/15/2011	12:00:57 PM	SiCl4 pre valve opened
7/15/2011	12:00:57 PM	SiCl4 post valve opened
7/15/2011	12:00:57 PM	Bubbler valve opened
7/15/2011	12:00:57 PM	Helium MFC set to  0.000000
7/15/2011	12:00:57 PM	H2 MFC set to  500.000000
7/15/2011	12:00:57 PM	BCl3 MFC set to  0.000000
7/15/2011	12:00:57 PM	PHl3 MFC set to  0.400000
7/15/2011	12:00:57 PM	SiCl4 MFC set to  50.000000
7/15/2011	12:00:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:00:57 PM	Tube furnace set to 1000
7/15/2011	12:17:57 PM	Helium valve closed
7/15/2011	12:17:57 PM	BCl3 valve closed
7/15/2011	12:17:57 PM	PH3 valve closed
7/15/2011	12:17:57 PM	SiCl4 pre valve closed
7/15/2011	12:17:57 PM	SiCl4 post valve closed
7/15/2011	12:17:57 PM	Main Vac valve closed
7/15/2011	12:17:57 PM	Bypass valve closed
7/15/2011	12:17:57 PM	H2 valve opened
7/15/2011	12:17:57 PM	Bubbler valve opened
7/15/2011	12:17:57 PM	Helium MFC set to  0.000000
7/15/2011	12:17:57 PM	H2 MFC set to  500.000000
7/15/2011	12:17:57 PM	BCl3 MFC set to  0.000000
7/15/2011	12:17:57 PM	PHl3 MFC set to  0.000000
7/15/2011	12:17:57 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:17:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:17:58 PM	Tube furnace set to 950
7/15/2011	12:19:58 PM	Helium valve closed
7/15/2011	12:19:58 PM	BCl3 valve closed
7/15/2011	12:19:58 PM	PH3 valve closed
7/15/2011	12:19:58 PM	SiCl4 pre valve closed
7/15/2011	12:19:58 PM	SiCl4 post valve closed
7/15/2011	12:19:58 PM	Main Vac valve closed
7/15/2011	12:19:58 PM	Bypass valve closed
7/15/2011	12:19:58 PM	H2 valve opened
7/15/2011	12:19:58 PM	Bubbler valve opened
7/15/2011	12:19:58 PM	Helium MFC set to  0.000000
7/15/2011	12:19:58 PM	H2 MFC set to  500.000000
7/15/2011	12:19:58 PM	BCl3 MFC set to  0.000000
7/15/2011	12:19:58 PM	PHl3 MFC set to  0.000000
7/15/2011	12:19:58 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:19:58 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:19:58 PM	Tube furnace set to 900
7/15/2011	12:21:58 PM	Helium valve closed
7/15/2011	12:21:58 PM	BCl3 valve closed
7/15/2011	12:21:58 PM	PH3 valve closed
7/15/2011	12:21:58 PM	SiCl4 pre valve closed
7/15/2011	12:21:58 PM	SiCl4 post valve closed
7/15/2011	12:21:58 PM	Main Vac valve closed
7/15/2011	12:21:58 PM	Bypass valve closed
7/15/2011	12:21:58 PM	H2 valve opened
7/15/2011	12:21:58 PM	Bubbler valve opened
7/15/2011	12:21:58 PM	Helium MFC set to  0.000000
7/15/2011	12:21:58 PM	H2 MFC set to  500.000000
7/15/2011	12:21:58 PM	BCl3 MFC set to  0.000000
7/15/2011	12:21:58 PM	PHl3 MFC set to  0.000000
7/15/2011	12:21:58 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:21:58 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:21:58 PM	Tube furnace set to 850
7/15/2011	12:23:58 PM	H2 valve closed
7/15/2011	12:23:58 PM	BCl3 valve closed
7/15/2011	12:23:58 PM	PH3 valve closed
7/15/2011	12:23:58 PM	SiCl4 pre valve closed
7/15/2011	12:23:58 PM	SiCl4 post valve closed
7/15/2011	12:23:58 PM	Main Vac valve closed
7/15/2011	12:23:58 PM	Bypass valve closed
7/15/2011	12:23:58 PM	Helium valve opened
7/15/2011	12:23:58 PM	Bubbler valve opened
7/15/2011	12:23:58 PM	Helium MFC set to  500.000000
7/15/2011	12:23:58 PM	H2 MFC set to  0.000000
7/15/2011	12:23:58 PM	BCl3 MFC set to  0.000000
7/15/2011	12:23:58 PM	PHl3 MFC set to  0.000000
7/15/2011	12:23:58 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:23:58 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:23:58 PM	Tube furnace set to 800
7/15/2011	12:25:58 PM	H2 valve closed
7/15/2011	12:25:58 PM	BCl3 valve closed
7/15/2011	12:25:58 PM	PH3 valve closed
7/15/2011	12:25:58 PM	SiCl4 pre valve closed
7/15/2011	12:25:58 PM	SiCl4 post valve closed
7/15/2011	12:25:58 PM	Main Vac valve closed
7/15/2011	12:25:58 PM	Bypass valve closed
7/15/2011	12:25:58 PM	Helium valve opened
7/15/2011	12:25:58 PM	Bubbler valve opened
7/15/2011	12:25:58 PM	Helium MFC set to  500.000000
7/15/2011	12:25:58 PM	H2 MFC set to  0.000000
7/15/2011	12:25:58 PM	BCl3 MFC set to  0.000000
7/15/2011	12:25:58 PM	PHl3 MFC set to  0.000000
7/15/2011	12:25:58 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:25:58 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:25:58 PM	Tube furnace set to 750
7/15/2011	12:27:58 PM	H2 valve closed
7/15/2011	12:27:58 PM	BCl3 valve closed
7/15/2011	12:27:58 PM	PH3 valve closed
7/15/2011	12:27:58 PM	SiCl4 pre valve closed
7/15/2011	12:27:58 PM	SiCl4 post valve closed
7/15/2011	12:27:58 PM	Main Vac valve closed
7/15/2011	12:27:58 PM	Bypass valve closed
7/15/2011	12:27:58 PM	Helium valve opened
7/15/2011	12:27:58 PM	Bubbler valve opened
7/15/2011	12:27:58 PM	Helium MFC set to  500.000000
7/15/2011	12:27:58 PM	H2 MFC set to  0.000000
7/15/2011	12:27:58 PM	BCl3 MFC set to  0.000000
7/15/2011	12:27:58 PM	PHl3 MFC set to  0.000000
7/15/2011	12:27:58 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:27:58 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:27:59 PM	Tube furnace set to 0
7/15/2011	12:47:59 PM	Helium valve closed
7/15/2011	12:47:59 PM	H2 valve closed
7/15/2011	12:47:59 PM	BCl3 valve closed
7/15/2011	12:47:59 PM	PH3 valve closed
7/15/2011	12:47:59 PM	SiCl4 pre valve closed
7/15/2011	12:47:59 PM	SiCl4 post valve closed
7/15/2011	12:47:59 PM	Main Vac valve closed
7/15/2011	12:47:59 PM	Bypass valve closed
7/15/2011	12:47:59 PM	Bubbler valve closed
7/15/2011	12:47:59 PM	Helium MFC set to  0.000000
7/15/2011	12:47:59 PM	H2 MFC set to  0.000000
7/15/2011	12:47:59 PM	BCl3 MFC set to  0.000000
7/15/2011	12:47:59 PM	PHl3 MFC set to  0.000000
7/15/2011	12:47:59 PM	SiCl4 MFC set to  0.000000
7/15/2011	12:47:59 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	12:47:59 PM	Tube furnace set to 0
7/15/2011	12:48:00 PM	Run finished at 12:48 PM
7/15/2011	1:08:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	1:08:06 PM	Recipe started at 1:08 PM
7/15/2011	1:08:06 PM	Helium valve closed
7/15/2011	1:08:06 PM	H2 valve closed
7/15/2011	1:08:06 PM	BCl3 valve closed
7/15/2011	1:08:06 PM	PH3 valve closed
7/15/2011	1:08:06 PM	SiCl4 pre valve closed
7/15/2011	1:08:06 PM	SiCl4 post valve closed
7/15/2011	1:08:06 PM	Main Vac valve closed
7/15/2011	1:08:06 PM	Bypass valve closed
7/15/2011	1:08:06 PM	Bubbler valve closed
7/15/2011	1:08:06 PM	Helium MFC set to  0.000000
7/15/2011	1:08:06 PM	H2 MFC set to  0.000000
7/15/2011	1:08:06 PM	BCl3 MFC set to  0.000000
7/15/2011	1:08:06 PM	PHl3 MFC set to  0.000000
7/15/2011	1:08:06 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:08:06 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:08:06 PM	Tube furnace set to 0
7/15/2011	1:08:09 PM	H2 valve closed
7/15/2011	1:08:09 PM	BCl3 valve closed
7/15/2011	1:08:09 PM	PH3 valve closed
7/15/2011	1:08:09 PM	SiCl4 pre valve closed
7/15/2011	1:08:09 PM	SiCl4 post valve closed
7/15/2011	1:08:09 PM	Main Vac valve closed
7/15/2011	1:08:09 PM	Bypass valve closed
7/15/2011	1:08:09 PM	Bubbler valve closed
7/15/2011	1:08:09 PM	Helium valve opened
7/15/2011	1:08:09 PM	Helium MFC set to  500.000000
7/15/2011	1:08:09 PM	H2 MFC set to  0.000000
7/15/2011	1:08:09 PM	BCl3 MFC set to  0.000000
7/15/2011	1:08:09 PM	PHl3 MFC set to  0.000000
7/15/2011	1:08:09 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:08:09 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:08:09 PM	Tube furnace set to 0
7/15/2011	1:08:15 PM	Helium valve closed
7/15/2011	1:08:15 PM	H2 valve closed
7/15/2011	1:08:15 PM	BCl3 valve closed
7/15/2011	1:08:15 PM	PH3 valve closed
7/15/2011	1:08:15 PM	SiCl4 pre valve closed
7/15/2011	1:08:15 PM	SiCl4 post valve closed
7/15/2011	1:08:15 PM	Main Vac valve closed
7/15/2011	1:08:15 PM	Bypass valve closed
7/15/2011	1:08:15 PM	Bubbler valve closed
7/15/2011	1:08:15 PM	Helium MFC set to  0.000000
7/15/2011	1:08:15 PM	H2 MFC set to  0.000000
7/15/2011	1:08:15 PM	BCl3 MFC set to  0.000000
7/15/2011	1:08:15 PM	PHl3 MFC set to  0.000000
7/15/2011	1:08:15 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:08:15 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:08:15 PM	Tube furnace set to 0
7/15/2011	1:08:16 PM	Run finished at 1:08 PM
7/15/2011	1:08:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	1:14:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	1:14:39 PM	Recipe started at 1:14 PM
7/15/2011	1:14:39 PM	Helium valve closed
7/15/2011	1:14:39 PM	H2 valve closed
7/15/2011	1:14:39 PM	BCl3 valve closed
7/15/2011	1:14:39 PM	PH3 valve closed
7/15/2011	1:14:39 PM	SiCl4 pre valve closed
7/15/2011	1:14:39 PM	SiCl4 post valve closed
7/15/2011	1:14:39 PM	Main Vac valve closed
7/15/2011	1:14:39 PM	Bubbler valve closed
7/15/2011	1:14:39 PM	Bypass valve opened
7/15/2011	1:14:39 PM	Helium MFC set to  0.000000
7/15/2011	1:14:39 PM	H2 MFC set to  0.000000
7/15/2011	1:14:39 PM	BCl3 MFC set to  0.000000
7/15/2011	1:14:39 PM	PHl3 MFC set to  0.000000
7/15/2011	1:14:39 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:14:39 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:14:39 PM	Tube furnace set to 0
7/15/2011	1:15:41 PM	Helium valve closed
7/15/2011	1:15:41 PM	H2 valve closed
7/15/2011	1:15:41 PM	BCl3 valve closed
7/15/2011	1:15:41 PM	PH3 valve closed
7/15/2011	1:15:41 PM	SiCl4 pre valve closed
7/15/2011	1:15:41 PM	SiCl4 post valve closed
7/15/2011	1:15:41 PM	Main Vac valve closed
7/15/2011	1:15:41 PM	Bubbler valve closed
7/15/2011	1:15:41 PM	Bypass valve opened
7/15/2011	1:15:41 PM	Helium MFC set to  0.000000
7/15/2011	1:15:41 PM	H2 MFC set to  0.000000
7/15/2011	1:15:41 PM	BCl3 MFC set to  0.000000
7/15/2011	1:15:41 PM	PHl3 MFC set to  0.000000
7/15/2011	1:15:41 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:15:41 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:15:41 PM	Tube furnace set to 0
7/15/2011	1:16:41 PM	Helium valve closed
7/15/2011	1:16:41 PM	H2 valve closed
7/15/2011	1:16:41 PM	BCl3 valve closed
7/15/2011	1:16:41 PM	PH3 valve closed
7/15/2011	1:16:41 PM	SiCl4 pre valve closed
7/15/2011	1:16:41 PM	SiCl4 post valve closed
7/15/2011	1:16:41 PM	Bypass valve closed
7/15/2011	1:16:41 PM	Bubbler valve closed
7/15/2011	1:16:41 PM	Main Vac valve opened
7/15/2011	1:16:41 PM	Helium MFC set to  0.000000
7/15/2011	1:16:41 PM	H2 MFC set to  0.000000
7/15/2011	1:16:41 PM	BCl3 MFC set to  0.000000
7/15/2011	1:16:41 PM	PHl3 MFC set to  0.000000
7/15/2011	1:16:41 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:16:41 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:16:41 PM	Tube furnace set to 0
7/15/2011	1:16:42 PM	Run finished at 1:16 PM
7/15/2011	1:16:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	1:45:59 PM	Main Vac valve closed
7/15/2011	1:46:10 PM	Main Vac valve opened
7/15/2011	1:46:27 PM	Helium MFC set to  10.000000
7/15/2011	1:46:30 PM	Helium valve opened
7/15/2011	1:47:33 PM	Helium MFC set to  20.000000
7/15/2011	1:52:27 PM	Helium valve closed
7/15/2011	1:52:32 PM	Helium MFC set to  0.000000
7/15/2011	1:53:09 PM	Main Vac valve closed
7/15/2011	1:53:19 PM	Main Vac valve opened
7/15/2011	1:54:02 PM	Recipe started at 1:53 PM
7/15/2011	1:54:02 PM	Helium valve closed
7/15/2011	1:54:02 PM	H2 valve closed
7/15/2011	1:54:02 PM	BCl3 valve closed
7/15/2011	1:54:02 PM	PH3 valve closed
7/15/2011	1:54:02 PM	SiCl4 pre valve closed
7/15/2011	1:54:02 PM	SiCl4 post valve closed
7/15/2011	1:54:02 PM	Main Vac valve closed
7/15/2011	1:54:02 PM	Bypass valve closed
7/15/2011	1:54:02 PM	Bubbler valve closed
7/15/2011	1:54:02 PM	Helium MFC set to  0.000000
7/15/2011	1:54:02 PM	H2 MFC set to  0.000000
7/15/2011	1:54:02 PM	BCl3 MFC set to  0.000000
7/15/2011	1:54:02 PM	PHl3 MFC set to  0.000000
7/15/2011	1:54:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:54:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:54:02 PM	Tube furnace set to 0
7/15/2011	1:54:05 PM	Helium valve closed
7/15/2011	1:54:05 PM	BCl3 valve closed
7/15/2011	1:54:05 PM	PH3 valve closed
7/15/2011	1:54:05 PM	SiCl4 pre valve closed
7/15/2011	1:54:05 PM	SiCl4 post valve closed
7/15/2011	1:54:05 PM	Main Vac valve closed
7/15/2011	1:54:05 PM	Bypass valve closed
7/15/2011	1:54:05 PM	Bubbler valve closed
7/15/2011	1:54:05 PM	H2 valve opened
7/15/2011	1:54:05 PM	Helium MFC set to  0.000000
7/15/2011	1:54:05 PM	H2 MFC set to  500.000000
7/15/2011	1:54:05 PM	BCl3 MFC set to  0.000000
7/15/2011	1:54:05 PM	PHl3 MFC set to  0.000000
7/15/2011	1:54:05 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:54:05 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:54:05 PM	Tube furnace set to 0
7/15/2011	1:55:08 PM	Helium valve closed
7/15/2011	1:55:08 PM	BCl3 valve closed
7/15/2011	1:55:08 PM	PH3 valve closed
7/15/2011	1:55:08 PM	SiCl4 pre valve closed
7/15/2011	1:55:08 PM	SiCl4 post valve closed
7/15/2011	1:55:08 PM	Main Vac valve closed
7/15/2011	1:55:08 PM	Bypass valve closed
7/15/2011	1:55:08 PM	H2 valve opened
7/15/2011	1:55:08 PM	Bubbler valve opened
7/15/2011	1:55:08 PM	Helium MFC set to  0.000000
7/15/2011	1:55:08 PM	H2 MFC set to  500.000000
7/15/2011	1:55:08 PM	BCl3 MFC set to  0.000000
7/15/2011	1:55:08 PM	PHl3 MFC set to  0.000000
7/15/2011	1:55:08 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:55:08 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:55:08 PM	Tube furnace set to 0
7/15/2011	1:55:09 PM	Helium valve closed
7/15/2011	1:55:09 PM	BCl3 valve closed
7/15/2011	1:55:09 PM	PH3 valve closed
7/15/2011	1:55:09 PM	SiCl4 pre valve closed
7/15/2011	1:55:09 PM	SiCl4 post valve closed
7/15/2011	1:55:09 PM	Main Vac valve closed
7/15/2011	1:55:09 PM	Bypass valve closed
7/15/2011	1:55:09 PM	H2 valve opened
7/15/2011	1:55:09 PM	Bubbler valve opened
7/15/2011	1:55:09 PM	Helium MFC set to  0.000000
7/15/2011	1:55:09 PM	H2 MFC set to  500.000000
7/15/2011	1:55:09 PM	BCl3 MFC set to  0.000000
7/15/2011	1:55:09 PM	PHl3 MFC set to  0.000000
7/15/2011	1:55:09 PM	SiCl4 MFC set to  0.000000
7/15/2011	1:55:09 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	1:55:10 PM	Tube furnace set to 1000
7/15/2011	2:15:10 PM	Helium valve closed
7/15/2011	2:15:10 PM	BCl3 valve closed
7/15/2011	2:15:10 PM	Main Vac valve closed
7/15/2011	2:15:10 PM	Bypass valve closed
7/15/2011	2:15:10 PM	H2 valve opened
7/15/2011	2:15:10 PM	PH3 valve opened
7/15/2011	2:15:10 PM	SiCl4 pre valve opened
7/15/2011	2:15:10 PM	SiCl4 post valve opened
7/15/2011	2:15:10 PM	Bubbler valve opened
7/15/2011	2:15:10 PM	Helium MFC set to  0.000000
7/15/2011	2:15:10 PM	H2 MFC set to  500.000000
7/15/2011	2:15:10 PM	BCl3 MFC set to  0.000000
7/15/2011	2:15:10 PM	PHl3 MFC set to  0.800000
7/15/2011	2:15:10 PM	SiCl4 MFC set to  50.000000
7/15/2011	2:15:10 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:15:10 PM	Tube furnace set to 1000
7/15/2011	2:29:10 PM	Helium valve closed
7/15/2011	2:29:10 PM	BCl3 valve closed
7/15/2011	2:29:10 PM	PH3 valve closed
7/15/2011	2:29:10 PM	SiCl4 pre valve closed
7/15/2011	2:29:10 PM	SiCl4 post valve closed
7/15/2011	2:29:10 PM	Main Vac valve closed
7/15/2011	2:29:10 PM	Bypass valve closed
7/15/2011	2:29:10 PM	H2 valve opened
7/15/2011	2:29:10 PM	Bubbler valve opened
7/15/2011	2:29:10 PM	Helium MFC set to  0.000000
7/15/2011	2:29:10 PM	H2 MFC set to  500.000000
7/15/2011	2:29:10 PM	BCl3 MFC set to  0.000000
7/15/2011	2:29:10 PM	PHl3 MFC set to  0.000000
7/15/2011	2:29:10 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:29:10 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:29:10 PM	Tube furnace set to 950
7/15/2011	2:31:10 PM	Helium valve closed
7/15/2011	2:31:10 PM	BCl3 valve closed
7/15/2011	2:31:10 PM	PH3 valve closed
7/15/2011	2:31:10 PM	SiCl4 pre valve closed
7/15/2011	2:31:10 PM	SiCl4 post valve closed
7/15/2011	2:31:10 PM	Main Vac valve closed
7/15/2011	2:31:10 PM	Bypass valve closed
7/15/2011	2:31:10 PM	H2 valve opened
7/15/2011	2:31:10 PM	Bubbler valve opened
7/15/2011	2:31:10 PM	Helium MFC set to  0.000000
7/15/2011	2:31:10 PM	H2 MFC set to  500.000000
7/15/2011	2:31:10 PM	BCl3 MFC set to  0.000000
7/15/2011	2:31:10 PM	PHl3 MFC set to  0.000000
7/15/2011	2:31:10 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:31:10 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:31:10 PM	Tube furnace set to 900
7/15/2011	2:33:10 PM	Helium valve closed
7/15/2011	2:33:10 PM	BCl3 valve closed
7/15/2011	2:33:10 PM	PH3 valve closed
7/15/2011	2:33:10 PM	SiCl4 pre valve closed
7/15/2011	2:33:10 PM	SiCl4 post valve closed
7/15/2011	2:33:10 PM	Main Vac valve closed
7/15/2011	2:33:10 PM	Bypass valve closed
7/15/2011	2:33:10 PM	H2 valve opened
7/15/2011	2:33:10 PM	Bubbler valve opened
7/15/2011	2:33:10 PM	Helium MFC set to  0.000000
7/15/2011	2:33:10 PM	H2 MFC set to  500.000000
7/15/2011	2:33:10 PM	BCl3 MFC set to  0.000000
7/15/2011	2:33:10 PM	PHl3 MFC set to  0.000000
7/15/2011	2:33:10 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:33:10 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:33:10 PM	Tube furnace set to 850
7/15/2011	2:35:10 PM	H2 valve closed
7/15/2011	2:35:10 PM	BCl3 valve closed
7/15/2011	2:35:10 PM	PH3 valve closed
7/15/2011	2:35:10 PM	SiCl4 pre valve closed
7/15/2011	2:35:10 PM	SiCl4 post valve closed
7/15/2011	2:35:10 PM	Main Vac valve closed
7/15/2011	2:35:10 PM	Bypass valve closed
7/15/2011	2:35:10 PM	Helium valve opened
7/15/2011	2:35:10 PM	Bubbler valve opened
7/15/2011	2:35:10 PM	Helium MFC set to  500.000000
7/15/2011	2:35:10 PM	H2 MFC set to  0.000000
7/15/2011	2:35:10 PM	BCl3 MFC set to  0.000000
7/15/2011	2:35:10 PM	PHl3 MFC set to  0.000000
7/15/2011	2:35:10 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:35:10 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:35:11 PM	Tube furnace set to 800
7/15/2011	2:37:11 PM	H2 valve closed
7/15/2011	2:37:11 PM	BCl3 valve closed
7/15/2011	2:37:11 PM	PH3 valve closed
7/15/2011	2:37:11 PM	SiCl4 pre valve closed
7/15/2011	2:37:11 PM	SiCl4 post valve closed
7/15/2011	2:37:11 PM	Main Vac valve closed
7/15/2011	2:37:11 PM	Bypass valve closed
7/15/2011	2:37:11 PM	Helium valve opened
7/15/2011	2:37:11 PM	Bubbler valve opened
7/15/2011	2:37:11 PM	Helium MFC set to  500.000000
7/15/2011	2:37:11 PM	H2 MFC set to  0.000000
7/15/2011	2:37:11 PM	BCl3 MFC set to  0.000000
7/15/2011	2:37:11 PM	PHl3 MFC set to  0.000000
7/15/2011	2:37:11 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:37:11 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:37:11 PM	Tube furnace set to 750
7/15/2011	2:39:11 PM	H2 valve closed
7/15/2011	2:39:11 PM	BCl3 valve closed
7/15/2011	2:39:11 PM	PH3 valve closed
7/15/2011	2:39:11 PM	SiCl4 pre valve closed
7/15/2011	2:39:11 PM	SiCl4 post valve closed
7/15/2011	2:39:11 PM	Main Vac valve closed
7/15/2011	2:39:11 PM	Bypass valve closed
7/15/2011	2:39:11 PM	Helium valve opened
7/15/2011	2:39:11 PM	Bubbler valve opened
7/15/2011	2:39:11 PM	Helium MFC set to  500.000000
7/15/2011	2:39:11 PM	H2 MFC set to  0.000000
7/15/2011	2:39:11 PM	BCl3 MFC set to  0.000000
7/15/2011	2:39:11 PM	PHl3 MFC set to  0.000000
7/15/2011	2:39:11 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:39:11 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:39:11 PM	Tube furnace set to 0
7/15/2011	2:59:11 PM	Helium valve closed
7/15/2011	2:59:11 PM	H2 valve closed
7/15/2011	2:59:11 PM	BCl3 valve closed
7/15/2011	2:59:11 PM	PH3 valve closed
7/15/2011	2:59:11 PM	SiCl4 pre valve closed
7/15/2011	2:59:11 PM	SiCl4 post valve closed
7/15/2011	2:59:11 PM	Main Vac valve closed
7/15/2011	2:59:11 PM	Bypass valve closed
7/15/2011	2:59:11 PM	Bubbler valve closed
7/15/2011	2:59:11 PM	Helium MFC set to  0.000000
7/15/2011	2:59:11 PM	H2 MFC set to  0.000000
7/15/2011	2:59:11 PM	BCl3 MFC set to  0.000000
7/15/2011	2:59:11 PM	PHl3 MFC set to  0.000000
7/15/2011	2:59:11 PM	SiCl4 MFC set to  0.000000
7/15/2011	2:59:11 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	2:59:11 PM	Tube furnace set to 0
7/15/2011	2:59:12 PM	Run finished at 2:59 PM
7/15/2011	3:14:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	3:14:49 PM	Recipe started at 3:14 PM
7/15/2011	3:14:49 PM	Helium valve closed
7/15/2011	3:14:49 PM	H2 valve closed
7/15/2011	3:14:49 PM	BCl3 valve closed
7/15/2011	3:14:49 PM	PH3 valve closed
7/15/2011	3:14:49 PM	SiCl4 pre valve closed
7/15/2011	3:14:49 PM	SiCl4 post valve closed
7/15/2011	3:14:49 PM	Main Vac valve closed
7/15/2011	3:14:49 PM	Bypass valve closed
7/15/2011	3:14:49 PM	Bubbler valve closed
7/15/2011	3:14:49 PM	Helium MFC set to  0.000000
7/15/2011	3:14:49 PM	H2 MFC set to  0.000000
7/15/2011	3:14:49 PM	BCl3 MFC set to  0.000000
7/15/2011	3:14:49 PM	PHl3 MFC set to  0.000000
7/15/2011	3:14:49 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:14:49 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:14:50 PM	Tube furnace set to 0
7/15/2011	3:14:53 PM	H2 valve closed
7/15/2011	3:14:53 PM	BCl3 valve closed
7/15/2011	3:14:53 PM	PH3 valve closed
7/15/2011	3:14:53 PM	SiCl4 pre valve closed
7/15/2011	3:14:53 PM	SiCl4 post valve closed
7/15/2011	3:14:53 PM	Main Vac valve closed
7/15/2011	3:14:53 PM	Bypass valve closed
7/15/2011	3:14:53 PM	Bubbler valve closed
7/15/2011	3:14:53 PM	Helium valve opened
7/15/2011	3:14:53 PM	Helium MFC set to  500.000000
7/15/2011	3:14:53 PM	H2 MFC set to  0.000000
7/15/2011	3:14:53 PM	BCl3 MFC set to  0.000000
7/15/2011	3:14:53 PM	PHl3 MFC set to  0.000000
7/15/2011	3:14:53 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:14:53 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:14:53 PM	Tube furnace set to 0
7/15/2011	3:14:59 PM	Helium valve closed
7/15/2011	3:14:59 PM	H2 valve closed
7/15/2011	3:14:59 PM	BCl3 valve closed
7/15/2011	3:14:59 PM	PH3 valve closed
7/15/2011	3:14:59 PM	SiCl4 pre valve closed
7/15/2011	3:14:59 PM	SiCl4 post valve closed
7/15/2011	3:14:59 PM	Main Vac valve closed
7/15/2011	3:14:59 PM	Bypass valve closed
7/15/2011	3:14:59 PM	Bubbler valve closed
7/15/2011	3:14:59 PM	Helium MFC set to  0.000000
7/15/2011	3:14:59 PM	H2 MFC set to  0.000000
7/15/2011	3:14:59 PM	BCl3 MFC set to  0.000000
7/15/2011	3:14:59 PM	PHl3 MFC set to  0.000000
7/15/2011	3:14:59 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:14:59 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:14:59 PM	Tube furnace set to 0
7/15/2011	3:15:00 PM	Run finished at 3:15 PM
7/15/2011	3:15:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	3:20:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	3:20:31 PM	Recipe started at 3:20 PM
7/15/2011	3:20:31 PM	Helium valve closed
7/15/2011	3:20:31 PM	H2 valve closed
7/15/2011	3:20:31 PM	BCl3 valve closed
7/15/2011	3:20:31 PM	PH3 valve closed
7/15/2011	3:20:31 PM	SiCl4 pre valve closed
7/15/2011	3:20:31 PM	SiCl4 post valve closed
7/15/2011	3:20:31 PM	Main Vac valve closed
7/15/2011	3:20:31 PM	Bubbler valve closed
7/15/2011	3:20:31 PM	Bypass valve opened
7/15/2011	3:20:31 PM	Helium MFC set to  0.000000
7/15/2011	3:20:31 PM	H2 MFC set to  0.000000
7/15/2011	3:20:31 PM	BCl3 MFC set to  0.000000
7/15/2011	3:20:31 PM	PHl3 MFC set to  0.000000
7/15/2011	3:20:31 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:20:31 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:20:31 PM	Tube furnace set to 0
7/15/2011	3:21:34 PM	Helium valve closed
7/15/2011	3:21:34 PM	H2 valve closed
7/15/2011	3:21:34 PM	BCl3 valve closed
7/15/2011	3:21:34 PM	PH3 valve closed
7/15/2011	3:21:34 PM	SiCl4 pre valve closed
7/15/2011	3:21:34 PM	SiCl4 post valve closed
7/15/2011	3:21:34 PM	Main Vac valve closed
7/15/2011	3:21:34 PM	Bubbler valve closed
7/15/2011	3:21:34 PM	Bypass valve opened
7/15/2011	3:21:34 PM	Helium MFC set to  0.000000
7/15/2011	3:21:34 PM	H2 MFC set to  0.000000
7/15/2011	3:21:34 PM	BCl3 MFC set to  0.000000
7/15/2011	3:21:34 PM	PHl3 MFC set to  0.000000
7/15/2011	3:21:34 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:21:34 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:21:34 PM	Tube furnace set to 0
7/15/2011	3:22:34 PM	Helium valve closed
7/15/2011	3:22:34 PM	H2 valve closed
7/15/2011	3:22:34 PM	BCl3 valve closed
7/15/2011	3:22:34 PM	PH3 valve closed
7/15/2011	3:22:34 PM	SiCl4 pre valve closed
7/15/2011	3:22:34 PM	SiCl4 post valve closed
7/15/2011	3:22:34 PM	Bypass valve closed
7/15/2011	3:22:34 PM	Bubbler valve closed
7/15/2011	3:22:34 PM	Main Vac valve opened
7/15/2011	3:22:34 PM	Helium MFC set to  0.000000
7/15/2011	3:22:34 PM	H2 MFC set to  0.000000
7/15/2011	3:22:34 PM	BCl3 MFC set to  0.000000
7/15/2011	3:22:34 PM	PHl3 MFC set to  0.000000
7/15/2011	3:22:34 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:22:34 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:22:34 PM	Tube furnace set to 0
7/15/2011	3:22:35 PM	Run finished at 3:22 PM
7/15/2011	3:22:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	3:35:48 PM	Main Vac valve closed
7/15/2011	3:35:54 PM	Main Vac valve opened
7/15/2011	3:36:04 PM	Helium MFC set to  20.000000
7/15/2011	3:36:12 PM	Helium valve opened
7/15/2011	3:40:16 PM	Helium valve closed
7/15/2011	3:40:42 PM	Main Vac valve closed
7/15/2011	3:40:54 PM	Main Vac valve opened
7/15/2011	3:41:24 PM	Main Vac valve closed
7/15/2011	3:41:34 PM	Main Vac valve opened
7/15/2011	3:41:36 PM	Helium valve opened
7/15/2011	3:44:09 PM	Helium valve closed
7/15/2011	3:46:17 PM	Main Vac valve closed
7/15/2011	3:46:30 PM	Main Vac valve opened
7/15/2011	3:46:44 PM	Helium valve opened
7/15/2011	3:50:41 PM	Helium valve closed
7/15/2011	3:50:46 PM	Helium MFC set to  0.000000
7/15/2011	3:52:17 PM	Main Vac valve closed
7/15/2011	3:52:31 PM	Main Vac valve opened
7/15/2011	3:53:37 PM	Recipe started at 3:53 PM
7/15/2011	3:53:37 PM	Helium valve closed
7/15/2011	3:53:37 PM	H2 valve closed
7/15/2011	3:53:37 PM	BCl3 valve closed
7/15/2011	3:53:37 PM	PH3 valve closed
7/15/2011	3:53:37 PM	SiCl4 pre valve closed
7/15/2011	3:53:37 PM	SiCl4 post valve closed
7/15/2011	3:53:37 PM	Main Vac valve closed
7/15/2011	3:53:37 PM	Bypass valve closed
7/15/2011	3:53:37 PM	Bubbler valve closed
7/15/2011	3:53:37 PM	Helium MFC set to  0.000000
7/15/2011	3:53:37 PM	H2 MFC set to  0.000000
7/15/2011	3:53:37 PM	BCl3 MFC set to  0.000000
7/15/2011	3:53:37 PM	PHl3 MFC set to  0.000000
7/15/2011	3:53:37 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:53:37 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:53:38 PM	Tube furnace set to 0
7/15/2011	3:53:41 PM	Helium valve closed
7/15/2011	3:53:41 PM	BCl3 valve closed
7/15/2011	3:53:41 PM	PH3 valve closed
7/15/2011	3:53:41 PM	SiCl4 pre valve closed
7/15/2011	3:53:41 PM	SiCl4 post valve closed
7/15/2011	3:53:41 PM	Main Vac valve closed
7/15/2011	3:53:41 PM	Bypass valve closed
7/15/2011	3:53:41 PM	Bubbler valve closed
7/15/2011	3:53:41 PM	H2 valve opened
7/15/2011	3:53:41 PM	Helium MFC set to  0.000000
7/15/2011	3:53:41 PM	H2 MFC set to  500.000000
7/15/2011	3:53:41 PM	BCl3 MFC set to  0.000000
7/15/2011	3:53:41 PM	PHl3 MFC set to  0.000000
7/15/2011	3:53:41 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:53:41 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:53:41 PM	Tube furnace set to 0
7/15/2011	3:54:44 PM	Helium valve closed
7/15/2011	3:54:44 PM	BCl3 valve closed
7/15/2011	3:54:44 PM	PH3 valve closed
7/15/2011	3:54:44 PM	SiCl4 pre valve closed
7/15/2011	3:54:44 PM	SiCl4 post valve closed
7/15/2011	3:54:44 PM	Main Vac valve closed
7/15/2011	3:54:44 PM	Bypass valve closed
7/15/2011	3:54:44 PM	H2 valve opened
7/15/2011	3:54:44 PM	Bubbler valve opened
7/15/2011	3:54:44 PM	Helium MFC set to  0.000000
7/15/2011	3:54:44 PM	H2 MFC set to  500.000000
7/15/2011	3:54:44 PM	BCl3 MFC set to  0.000000
7/15/2011	3:54:44 PM	PHl3 MFC set to  0.000000
7/15/2011	3:54:44 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:54:44 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:54:44 PM	Tube furnace set to 0
7/15/2011	3:54:45 PM	Helium valve closed
7/15/2011	3:54:45 PM	BCl3 valve closed
7/15/2011	3:54:45 PM	PH3 valve closed
7/15/2011	3:54:45 PM	SiCl4 pre valve closed
7/15/2011	3:54:45 PM	SiCl4 post valve closed
7/15/2011	3:54:45 PM	Main Vac valve closed
7/15/2011	3:54:45 PM	Bypass valve closed
7/15/2011	3:54:45 PM	H2 valve opened
7/15/2011	3:54:45 PM	Bubbler valve opened
7/15/2011	3:54:45 PM	Helium MFC set to  0.000000
7/15/2011	3:54:45 PM	H2 MFC set to  500.000000
7/15/2011	3:54:45 PM	BCl3 MFC set to  0.000000
7/15/2011	3:54:45 PM	PHl3 MFC set to  0.000000
7/15/2011	3:54:45 PM	SiCl4 MFC set to  0.000000
7/15/2011	3:54:45 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	3:54:45 PM	Tube furnace set to 1000
7/15/2011	4:14:46 PM	Helium valve closed
7/15/2011	4:14:46 PM	BCl3 valve closed
7/15/2011	4:14:46 PM	Main Vac valve closed
7/15/2011	4:14:46 PM	Bypass valve closed
7/15/2011	4:14:46 PM	H2 valve opened
7/15/2011	4:14:46 PM	PH3 valve opened
7/15/2011	4:14:46 PM	SiCl4 pre valve opened
7/15/2011	4:14:46 PM	SiCl4 post valve opened
7/15/2011	4:14:46 PM	Bubbler valve opened
7/15/2011	4:14:46 PM	Helium MFC set to  0.000000
7/15/2011	4:14:46 PM	H2 MFC set to  500.000000
7/15/2011	4:14:46 PM	BCl3 MFC set to  0.000000
7/15/2011	4:14:46 PM	PHl3 MFC set to  1.200000
7/15/2011	4:14:46 PM	SiCl4 MFC set to  50.000000
7/15/2011	4:14:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:14:46 PM	Tube furnace set to 1000
7/15/2011	4:27:46 PM	Helium valve closed
7/15/2011	4:27:46 PM	BCl3 valve closed
7/15/2011	4:27:46 PM	PH3 valve closed
7/15/2011	4:27:46 PM	SiCl4 pre valve closed
7/15/2011	4:27:46 PM	SiCl4 post valve closed
7/15/2011	4:27:46 PM	Main Vac valve closed
7/15/2011	4:27:46 PM	Bypass valve closed
7/15/2011	4:27:46 PM	H2 valve opened
7/15/2011	4:27:46 PM	Bubbler valve opened
7/15/2011	4:27:46 PM	Helium MFC set to  0.000000
7/15/2011	4:27:46 PM	H2 MFC set to  500.000000
7/15/2011	4:27:46 PM	BCl3 MFC set to  0.000000
7/15/2011	4:27:46 PM	PHl3 MFC set to  0.000000
7/15/2011	4:27:46 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:27:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:27:46 PM	Tube furnace set to 950
7/15/2011	4:29:46 PM	Helium valve closed
7/15/2011	4:29:46 PM	BCl3 valve closed
7/15/2011	4:29:46 PM	PH3 valve closed
7/15/2011	4:29:46 PM	SiCl4 pre valve closed
7/15/2011	4:29:46 PM	SiCl4 post valve closed
7/15/2011	4:29:46 PM	Main Vac valve closed
7/15/2011	4:29:46 PM	Bypass valve closed
7/15/2011	4:29:46 PM	H2 valve opened
7/15/2011	4:29:46 PM	Bubbler valve opened
7/15/2011	4:29:46 PM	Helium MFC set to  0.000000
7/15/2011	4:29:46 PM	H2 MFC set to  500.000000
7/15/2011	4:29:46 PM	BCl3 MFC set to  0.000000
7/15/2011	4:29:46 PM	PHl3 MFC set to  0.000000
7/15/2011	4:29:46 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:29:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:29:46 PM	Tube furnace set to 900
7/15/2011	4:31:46 PM	Helium valve closed
7/15/2011	4:31:46 PM	BCl3 valve closed
7/15/2011	4:31:46 PM	PH3 valve closed
7/15/2011	4:31:46 PM	SiCl4 pre valve closed
7/15/2011	4:31:46 PM	SiCl4 post valve closed
7/15/2011	4:31:46 PM	Main Vac valve closed
7/15/2011	4:31:46 PM	Bypass valve closed
7/15/2011	4:31:46 PM	H2 valve opened
7/15/2011	4:31:46 PM	Bubbler valve opened
7/15/2011	4:31:46 PM	Helium MFC set to  0.000000
7/15/2011	4:31:46 PM	H2 MFC set to  500.000000
7/15/2011	4:31:46 PM	BCl3 MFC set to  0.000000
7/15/2011	4:31:46 PM	PHl3 MFC set to  0.000000
7/15/2011	4:31:46 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:31:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:31:46 PM	Tube furnace set to 850
7/15/2011	4:33:46 PM	H2 valve closed
7/15/2011	4:33:46 PM	BCl3 valve closed
7/15/2011	4:33:46 PM	PH3 valve closed
7/15/2011	4:33:46 PM	SiCl4 pre valve closed
7/15/2011	4:33:46 PM	SiCl4 post valve closed
7/15/2011	4:33:46 PM	Main Vac valve closed
7/15/2011	4:33:46 PM	Bypass valve closed
7/15/2011	4:33:46 PM	Helium valve opened
7/15/2011	4:33:46 PM	Bubbler valve opened
7/15/2011	4:33:46 PM	Helium MFC set to  500.000000
7/15/2011	4:33:46 PM	H2 MFC set to  0.000000
7/15/2011	4:33:46 PM	BCl3 MFC set to  0.000000
7/15/2011	4:33:46 PM	PHl3 MFC set to  0.000000
7/15/2011	4:33:46 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:33:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:33:47 PM	Tube furnace set to 800
7/15/2011	4:35:47 PM	H2 valve closed
7/15/2011	4:35:47 PM	BCl3 valve closed
7/15/2011	4:35:47 PM	PH3 valve closed
7/15/2011	4:35:47 PM	SiCl4 pre valve closed
7/15/2011	4:35:47 PM	SiCl4 post valve closed
7/15/2011	4:35:47 PM	Main Vac valve closed
7/15/2011	4:35:47 PM	Bypass valve closed
7/15/2011	4:35:47 PM	Helium valve opened
7/15/2011	4:35:47 PM	Bubbler valve opened
7/15/2011	4:35:47 PM	Helium MFC set to  500.000000
7/15/2011	4:35:47 PM	H2 MFC set to  0.000000
7/15/2011	4:35:47 PM	BCl3 MFC set to  0.000000
7/15/2011	4:35:47 PM	PHl3 MFC set to  0.000000
7/15/2011	4:35:47 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:35:47 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:35:47 PM	Tube furnace set to 750
7/15/2011	4:37:47 PM	H2 valve closed
7/15/2011	4:37:47 PM	BCl3 valve closed
7/15/2011	4:37:47 PM	PH3 valve closed
7/15/2011	4:37:47 PM	SiCl4 pre valve closed
7/15/2011	4:37:47 PM	SiCl4 post valve closed
7/15/2011	4:37:47 PM	Main Vac valve closed
7/15/2011	4:37:47 PM	Bypass valve closed
7/15/2011	4:37:47 PM	Helium valve opened
7/15/2011	4:37:47 PM	Bubbler valve opened
7/15/2011	4:37:47 PM	Helium MFC set to  500.000000
7/15/2011	4:37:47 PM	H2 MFC set to  0.000000
7/15/2011	4:37:47 PM	BCl3 MFC set to  0.000000
7/15/2011	4:37:47 PM	PHl3 MFC set to  0.000000
7/15/2011	4:37:47 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:37:47 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:37:47 PM	Tube furnace set to 0
7/15/2011	4:57:47 PM	Helium valve closed
7/15/2011	4:57:47 PM	H2 valve closed
7/15/2011	4:57:47 PM	BCl3 valve closed
7/15/2011	4:57:47 PM	PH3 valve closed
7/15/2011	4:57:47 PM	SiCl4 pre valve closed
7/15/2011	4:57:47 PM	SiCl4 post valve closed
7/15/2011	4:57:47 PM	Main Vac valve closed
7/15/2011	4:57:47 PM	Bypass valve closed
7/15/2011	4:57:47 PM	Bubbler valve closed
7/15/2011	4:57:47 PM	Helium MFC set to  0.000000
7/15/2011	4:57:47 PM	H2 MFC set to  0.000000
7/15/2011	4:57:47 PM	BCl3 MFC set to  0.000000
7/15/2011	4:57:47 PM	PHl3 MFC set to  0.000000
7/15/2011	4:57:47 PM	SiCl4 MFC set to  0.000000
7/15/2011	4:57:47 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	4:57:47 PM	Tube furnace set to 0
7/15/2011	4:57:48 PM	Run finished at 4:57 PM
7/15/2011	5:45:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	5:45:05 PM	Recipe started at 5:45 PM
7/15/2011	5:45:05 PM	Helium valve closed
7/15/2011	5:45:05 PM	H2 valve closed
7/15/2011	5:45:05 PM	BCl3 valve closed
7/15/2011	5:45:05 PM	PH3 valve closed
7/15/2011	5:45:05 PM	SiCl4 pre valve closed
7/15/2011	5:45:05 PM	SiCl4 post valve closed
7/15/2011	5:45:05 PM	Main Vac valve closed
7/15/2011	5:45:05 PM	Bypass valve closed
7/15/2011	5:45:05 PM	Bubbler valve closed
7/15/2011	5:45:05 PM	Helium MFC set to  0.000000
7/15/2011	5:45:05 PM	H2 MFC set to  0.000000
7/15/2011	5:45:05 PM	BCl3 MFC set to  0.000000
7/15/2011	5:45:05 PM	PHl3 MFC set to  0.000000
7/15/2011	5:45:05 PM	SiCl4 MFC set to  0.000000
7/15/2011	5:45:05 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	5:45:05 PM	Tube furnace set to 0
7/15/2011	5:45:08 PM	H2 valve closed
7/15/2011	5:45:08 PM	BCl3 valve closed
7/15/2011	5:45:08 PM	PH3 valve closed
7/15/2011	5:45:08 PM	SiCl4 pre valve closed
7/15/2011	5:45:08 PM	SiCl4 post valve closed
7/15/2011	5:45:08 PM	Main Vac valve closed
7/15/2011	5:45:08 PM	Bypass valve closed
7/15/2011	5:45:08 PM	Bubbler valve closed
7/15/2011	5:45:09 PM	Helium valve opened
7/15/2011	5:45:09 PM	Helium MFC set to  500.000000
7/15/2011	5:45:09 PM	H2 MFC set to  0.000000
7/15/2011	5:45:09 PM	BCl3 MFC set to  0.000000
7/15/2011	5:45:09 PM	PHl3 MFC set to  0.000000
7/15/2011	5:45:09 PM	SiCl4 MFC set to  0.000000
7/15/2011	5:45:09 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	5:45:09 PM	Tube furnace set to 0
7/15/2011	5:45:09 PM	Helium valve closed
7/15/2011	5:45:09 PM	H2 valve closed
7/15/2011	5:45:09 PM	BCl3 valve closed
7/15/2011	5:45:09 PM	PH3 valve closed
7/15/2011	5:45:09 PM	SiCl4 pre valve closed
7/15/2011	5:45:09 PM	SiCl4 post valve closed
7/15/2011	5:45:09 PM	Main Vac valve closed
7/15/2011	5:45:09 PM	Bypass valve closed
7/15/2011	5:45:09 PM	Bubbler valve closed
7/15/2011	5:45:09 PM	Helium MFC set to  0.000000
7/15/2011	5:45:09 PM	H2 MFC set to  0.000000
7/15/2011	5:45:09 PM	BCl3 MFC set to  0.000000
7/15/2011	5:45:09 PM	PHl3 MFC set to  0.000000
7/15/2011	5:45:09 PM	SiCl4 MFC set to  0.000000
7/15/2011	5:45:09 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	5:45:09 PM	Tube furnace set to 0
7/15/2011	5:45:10 PM	Run finished at 5:45 PM
7/15/2011	5:45:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	5:50:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	5:50:59 PM	Recipe started at 5:50 PM
7/15/2011	5:50:59 PM	Helium valve closed
7/15/2011	5:50:59 PM	H2 valve closed
7/15/2011	5:50:59 PM	BCl3 valve closed
7/15/2011	5:50:59 PM	PH3 valve closed
7/15/2011	5:50:59 PM	SiCl4 pre valve closed
7/15/2011	5:50:59 PM	SiCl4 post valve closed
7/15/2011	5:50:59 PM	Main Vac valve closed
7/15/2011	5:50:59 PM	Bubbler valve closed
7/15/2011	5:50:59 PM	Bypass valve opened
7/15/2011	5:50:59 PM	Helium MFC set to  0.000000
7/15/2011	5:50:59 PM	H2 MFC set to  0.000000
7/15/2011	5:50:59 PM	BCl3 MFC set to  0.000000
7/15/2011	5:50:59 PM	PHl3 MFC set to  0.000000
7/15/2011	5:50:59 PM	SiCl4 MFC set to  0.000000
7/15/2011	5:50:59 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	5:50:59 PM	Tube furnace set to 0
7/15/2011	5:52:02 PM	Helium valve closed
7/15/2011	5:52:02 PM	H2 valve closed
7/15/2011	5:52:02 PM	BCl3 valve closed
7/15/2011	5:52:02 PM	PH3 valve closed
7/15/2011	5:52:02 PM	SiCl4 pre valve closed
7/15/2011	5:52:02 PM	SiCl4 post valve closed
7/15/2011	5:52:02 PM	Main Vac valve closed
7/15/2011	5:52:02 PM	Bubbler valve closed
7/15/2011	5:52:02 PM	Bypass valve opened
7/15/2011	5:52:02 PM	Helium MFC set to  0.000000
7/15/2011	5:52:02 PM	H2 MFC set to  0.000000
7/15/2011	5:52:02 PM	BCl3 MFC set to  0.000000
7/15/2011	5:52:02 PM	PHl3 MFC set to  0.000000
7/15/2011	5:52:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	5:52:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	5:52:02 PM	Tube furnace set to 0
7/15/2011	5:53:02 PM	Helium valve closed
7/15/2011	5:53:02 PM	H2 valve closed
7/15/2011	5:53:02 PM	BCl3 valve closed
7/15/2011	5:53:02 PM	PH3 valve closed
7/15/2011	5:53:02 PM	SiCl4 pre valve closed
7/15/2011	5:53:02 PM	SiCl4 post valve closed
7/15/2011	5:53:02 PM	Bypass valve closed
7/15/2011	5:53:02 PM	Bubbler valve closed
7/15/2011	5:53:02 PM	Main Vac valve opened
7/15/2011	5:53:02 PM	Helium MFC set to  0.000000
7/15/2011	5:53:02 PM	H2 MFC set to  0.000000
7/15/2011	5:53:02 PM	BCl3 MFC set to  0.000000
7/15/2011	5:53:02 PM	PHl3 MFC set to  0.000000
7/15/2011	5:53:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	5:53:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	5:53:02 PM	Tube furnace set to 0
7/15/2011	5:53:03 PM	Run finished at 5:53 PM
7/15/2011	5:53:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	6:06:45 PM	Helium MFC set to  20.000000
7/15/2011	6:06:48 PM	Helium valve opened
7/15/2011	6:09:23 PM	Helium valve closed
7/15/2011	6:12:47 PM	Main Vac valve closed
7/15/2011	6:12:56 PM	Main Vac valve opened
7/15/2011	6:20:46 PM	Helium valve opened
7/15/2011	6:23:23 PM	Helium valve closed
7/15/2011	6:23:27 PM	Helium MFC set to  0.000000
7/15/2011	6:32:14 PM	Main Vac valve closed
7/15/2011	6:32:22 PM	Main Vac valve opened
7/15/2011	6:41:12 PM	Recipe started at 6:41 PM
7/15/2011	6:41:12 PM	Helium valve closed
7/15/2011	6:41:12 PM	H2 valve closed
7/15/2011	6:41:12 PM	BCl3 valve closed
7/15/2011	6:41:12 PM	PH3 valve closed
7/15/2011	6:41:12 PM	SiCl4 pre valve closed
7/15/2011	6:41:12 PM	SiCl4 post valve closed
7/15/2011	6:41:12 PM	Main Vac valve closed
7/15/2011	6:41:12 PM	Bypass valve closed
7/15/2011	6:41:12 PM	Bubbler valve closed
7/15/2011	6:41:12 PM	Helium MFC set to  0.000000
7/15/2011	6:41:12 PM	H2 MFC set to  0.000000
7/15/2011	6:41:12 PM	BCl3 MFC set to  0.000000
7/15/2011	6:41:12 PM	PHl3 MFC set to  0.000000
7/15/2011	6:41:12 PM	SiCl4 MFC set to  0.000000
7/15/2011	6:41:12 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	6:41:12 PM	Tube furnace set to 0
7/15/2011	6:41:15 PM	Helium valve closed
7/15/2011	6:41:15 PM	BCl3 valve closed
7/15/2011	6:41:15 PM	PH3 valve closed
7/15/2011	6:41:15 PM	SiCl4 pre valve closed
7/15/2011	6:41:15 PM	SiCl4 post valve closed
7/15/2011	6:41:15 PM	Main Vac valve closed
7/15/2011	6:41:15 PM	Bypass valve closed
7/15/2011	6:41:15 PM	Bubbler valve closed
7/15/2011	6:41:15 PM	H2 valve opened
7/15/2011	6:41:15 PM	Helium MFC set to  0.000000
7/15/2011	6:41:15 PM	H2 MFC set to  500.000000
7/15/2011	6:41:15 PM	BCl3 MFC set to  0.000000
7/15/2011	6:41:15 PM	PHl3 MFC set to  0.000000
7/15/2011	6:41:15 PM	SiCl4 MFC set to  0.000000
7/15/2011	6:41:15 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	6:41:16 PM	Tube furnace set to 0
7/15/2011	6:42:19 PM	Helium valve closed
7/15/2011	6:42:19 PM	BCl3 valve closed
7/15/2011	6:42:19 PM	PH3 valve closed
7/15/2011	6:42:19 PM	SiCl4 pre valve closed
7/15/2011	6:42:19 PM	SiCl4 post valve closed
7/15/2011	6:42:19 PM	Main Vac valve closed
7/15/2011	6:42:19 PM	Bypass valve closed
7/15/2011	6:42:19 PM	H2 valve opened
7/15/2011	6:42:19 PM	Bubbler valve opened
7/15/2011	6:42:19 PM	Helium MFC set to  0.000000
7/15/2011	6:42:19 PM	H2 MFC set to  500.000000
7/15/2011	6:42:19 PM	BCl3 MFC set to  0.000000
7/15/2011	6:42:19 PM	PHl3 MFC set to  0.000000
7/15/2011	6:42:19 PM	SiCl4 MFC set to  0.000000
7/15/2011	6:42:19 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	6:42:20 PM	Tube furnace set to 0
7/15/2011	6:42:21 PM	Helium valve closed
7/15/2011	6:42:21 PM	BCl3 valve closed
7/15/2011	6:42:21 PM	PH3 valve closed
7/15/2011	6:42:21 PM	SiCl4 pre valve closed
7/15/2011	6:42:21 PM	SiCl4 post valve closed
7/15/2011	6:42:21 PM	Main Vac valve closed
7/15/2011	6:42:21 PM	Bypass valve closed
7/15/2011	6:42:21 PM	H2 valve opened
7/15/2011	6:42:21 PM	Bubbler valve opened
7/15/2011	6:42:21 PM	Helium MFC set to  0.000000
7/15/2011	6:42:21 PM	H2 MFC set to  500.000000
7/15/2011	6:42:21 PM	BCl3 MFC set to  0.000000
7/15/2011	6:42:21 PM	PHl3 MFC set to  0.000000
7/15/2011	6:42:21 PM	SiCl4 MFC set to  0.000000
7/15/2011	6:42:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	6:42:21 PM	Tube furnace set to 1000
7/15/2011	7:02:21 PM	Helium valve closed
7/15/2011	7:02:21 PM	BCl3 valve closed
7/15/2011	7:02:21 PM	Main Vac valve closed
7/15/2011	7:02:21 PM	Bypass valve closed
7/15/2011	7:02:21 PM	H2 valve opened
7/15/2011	7:02:21 PM	PH3 valve opened
7/15/2011	7:02:21 PM	SiCl4 pre valve opened
7/15/2011	7:02:21 PM	SiCl4 post valve opened
7/15/2011	7:02:21 PM	Bubbler valve opened
7/15/2011	7:02:21 PM	Helium MFC set to  0.000000
7/15/2011	7:02:21 PM	H2 MFC set to  500.000000
7/15/2011	7:02:21 PM	BCl3 MFC set to  0.000000
7/15/2011	7:02:21 PM	PHl3 MFC set to  1.600000
7/15/2011	7:02:21 PM	SiCl4 MFC set to  50.000000
7/15/2011	7:02:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:02:21 PM	Tube furnace set to 1000
7/15/2011	7:15:51 PM	Helium valve closed
7/15/2011	7:15:51 PM	BCl3 valve closed
7/15/2011	7:15:51 PM	PH3 valve closed
7/15/2011	7:15:51 PM	SiCl4 pre valve closed
7/15/2011	7:15:51 PM	SiCl4 post valve closed
7/15/2011	7:15:51 PM	Main Vac valve closed
7/15/2011	7:15:51 PM	Bypass valve closed
7/15/2011	7:15:51 PM	H2 valve opened
7/15/2011	7:15:51 PM	Bubbler valve opened
7/15/2011	7:15:51 PM	Helium MFC set to  0.000000
7/15/2011	7:15:51 PM	H2 MFC set to  500.000000
7/15/2011	7:15:51 PM	BCl3 MFC set to  0.000000
7/15/2011	7:15:51 PM	PHl3 MFC set to  0.000000
7/15/2011	7:15:51 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:15:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:15:51 PM	Tube furnace set to 950
7/15/2011	7:17:51 PM	Helium valve closed
7/15/2011	7:17:51 PM	BCl3 valve closed
7/15/2011	7:17:51 PM	PH3 valve closed
7/15/2011	7:17:51 PM	SiCl4 pre valve closed
7/15/2011	7:17:51 PM	SiCl4 post valve closed
7/15/2011	7:17:51 PM	Main Vac valve closed
7/15/2011	7:17:51 PM	Bypass valve closed
7/15/2011	7:17:51 PM	H2 valve opened
7/15/2011	7:17:51 PM	Bubbler valve opened
7/15/2011	7:17:51 PM	Helium MFC set to  0.000000
7/15/2011	7:17:51 PM	H2 MFC set to  500.000000
7/15/2011	7:17:51 PM	BCl3 MFC set to  0.000000
7/15/2011	7:17:51 PM	PHl3 MFC set to  0.000000
7/15/2011	7:17:51 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:17:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:17:51 PM	Tube furnace set to 900
7/15/2011	7:19:51 PM	Helium valve closed
7/15/2011	7:19:51 PM	BCl3 valve closed
7/15/2011	7:19:51 PM	PH3 valve closed
7/15/2011	7:19:51 PM	SiCl4 pre valve closed
7/15/2011	7:19:51 PM	SiCl4 post valve closed
7/15/2011	7:19:51 PM	Main Vac valve closed
7/15/2011	7:19:51 PM	Bypass valve closed
7/15/2011	7:19:51 PM	H2 valve opened
7/15/2011	7:19:51 PM	Bubbler valve opened
7/15/2011	7:19:51 PM	Helium MFC set to  0.000000
7/15/2011	7:19:51 PM	H2 MFC set to  500.000000
7/15/2011	7:19:51 PM	BCl3 MFC set to  0.000000
7/15/2011	7:19:51 PM	PHl3 MFC set to  0.000000
7/15/2011	7:19:51 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:19:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:19:52 PM	Tube furnace set to 850
7/15/2011	7:21:52 PM	H2 valve closed
7/15/2011	7:21:52 PM	BCl3 valve closed
7/15/2011	7:21:52 PM	PH3 valve closed
7/15/2011	7:21:52 PM	SiCl4 pre valve closed
7/15/2011	7:21:52 PM	SiCl4 post valve closed
7/15/2011	7:21:52 PM	Main Vac valve closed
7/15/2011	7:21:52 PM	Bypass valve closed
7/15/2011	7:21:52 PM	Helium valve opened
7/15/2011	7:21:52 PM	Bubbler valve opened
7/15/2011	7:21:52 PM	Helium MFC set to  500.000000
7/15/2011	7:21:52 PM	H2 MFC set to  0.000000
7/15/2011	7:21:52 PM	BCl3 MFC set to  0.000000
7/15/2011	7:21:52 PM	PHl3 MFC set to  0.000000
7/15/2011	7:21:52 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:21:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:21:52 PM	Tube furnace set to 800
7/15/2011	7:23:52 PM	H2 valve closed
7/15/2011	7:23:52 PM	BCl3 valve closed
7/15/2011	7:23:52 PM	PH3 valve closed
7/15/2011	7:23:52 PM	SiCl4 pre valve closed
7/15/2011	7:23:52 PM	SiCl4 post valve closed
7/15/2011	7:23:52 PM	Main Vac valve closed
7/15/2011	7:23:52 PM	Bypass valve closed
7/15/2011	7:23:52 PM	Helium valve opened
7/15/2011	7:23:52 PM	Bubbler valve opened
7/15/2011	7:23:52 PM	Helium MFC set to  500.000000
7/15/2011	7:23:52 PM	H2 MFC set to  0.000000
7/15/2011	7:23:52 PM	BCl3 MFC set to  0.000000
7/15/2011	7:23:52 PM	PHl3 MFC set to  0.000000
7/15/2011	7:23:52 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:23:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:23:52 PM	Tube furnace set to 750
7/15/2011	7:25:52 PM	H2 valve closed
7/15/2011	7:25:52 PM	BCl3 valve closed
7/15/2011	7:25:52 PM	PH3 valve closed
7/15/2011	7:25:52 PM	SiCl4 pre valve closed
7/15/2011	7:25:52 PM	SiCl4 post valve closed
7/15/2011	7:25:52 PM	Main Vac valve closed
7/15/2011	7:25:52 PM	Bypass valve closed
7/15/2011	7:25:52 PM	Helium valve opened
7/15/2011	7:25:52 PM	Bubbler valve opened
7/15/2011	7:25:52 PM	Helium MFC set to  500.000000
7/15/2011	7:25:52 PM	H2 MFC set to  0.000000
7/15/2011	7:25:52 PM	BCl3 MFC set to  0.000000
7/15/2011	7:25:52 PM	PHl3 MFC set to  0.000000
7/15/2011	7:25:52 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:25:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:25:52 PM	Tube furnace set to 0
7/15/2011	7:45:52 PM	Helium valve closed
7/15/2011	7:45:52 PM	H2 valve closed
7/15/2011	7:45:52 PM	BCl3 valve closed
7/15/2011	7:45:52 PM	PH3 valve closed
7/15/2011	7:45:52 PM	SiCl4 pre valve closed
7/15/2011	7:45:52 PM	SiCl4 post valve closed
7/15/2011	7:45:52 PM	Main Vac valve closed
7/15/2011	7:45:52 PM	Bypass valve closed
7/15/2011	7:45:52 PM	Bubbler valve closed
7/15/2011	7:45:52 PM	Helium MFC set to  0.000000
7/15/2011	7:45:52 PM	H2 MFC set to  0.000000
7/15/2011	7:45:52 PM	BCl3 MFC set to  0.000000
7/15/2011	7:45:52 PM	PHl3 MFC set to  0.000000
7/15/2011	7:45:52 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:45:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:45:52 PM	Tube furnace set to 0
7/15/2011	7:45:53 PM	Run finished at 7:45 PM
7/15/2011	7:45:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	7:45:58 PM	Recipe started at 7:45 PM
7/15/2011	7:45:58 PM	Helium valve closed
7/15/2011	7:45:58 PM	H2 valve closed
7/15/2011	7:45:58 PM	BCl3 valve closed
7/15/2011	7:45:58 PM	PH3 valve closed
7/15/2011	7:45:58 PM	SiCl4 pre valve closed
7/15/2011	7:45:58 PM	SiCl4 post valve closed
7/15/2011	7:45:58 PM	Main Vac valve closed
7/15/2011	7:45:59 PM	Bypass valve closed
7/15/2011	7:45:59 PM	Bubbler valve closed
7/15/2011	7:45:59 PM	Helium MFC set to  0.000000
7/15/2011	7:45:59 PM	H2 MFC set to  0.000000
7/15/2011	7:45:59 PM	BCl3 MFC set to  0.000000
7/15/2011	7:45:59 PM	PHl3 MFC set to  0.000000
7/15/2011	7:45:59 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:45:59 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:45:59 PM	Tube furnace set to 0
7/15/2011	7:46:02 PM	H2 valve closed
7/15/2011	7:46:02 PM	BCl3 valve closed
7/15/2011	7:46:02 PM	PH3 valve closed
7/15/2011	7:46:02 PM	SiCl4 pre valve closed
7/15/2011	7:46:02 PM	SiCl4 post valve closed
7/15/2011	7:46:02 PM	Main Vac valve closed
7/15/2011	7:46:02 PM	Bypass valve closed
7/15/2011	7:46:02 PM	Bubbler valve closed
7/15/2011	7:46:02 PM	Helium valve opened
7/15/2011	7:46:02 PM	Helium MFC set to  500.000000
7/15/2011	7:46:02 PM	H2 MFC set to  0.000000
7/15/2011	7:46:02 PM	BCl3 MFC set to  0.000000
7/15/2011	7:46:02 PM	PHl3 MFC set to  0.000000
7/15/2011	7:46:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:46:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:46:02 PM	Tube furnace set to 0
7/15/2011	7:46:02 PM	Helium valve closed
7/15/2011	7:46:02 PM	H2 valve closed
7/15/2011	7:46:02 PM	BCl3 valve closed
7/15/2011	7:46:02 PM	PH3 valve closed
7/15/2011	7:46:02 PM	SiCl4 pre valve closed
7/15/2011	7:46:02 PM	SiCl4 post valve closed
7/15/2011	7:46:02 PM	Main Vac valve closed
7/15/2011	7:46:02 PM	Bypass valve closed
7/15/2011	7:46:02 PM	Bubbler valve closed
7/15/2011	7:46:02 PM	Helium MFC set to  0.000000
7/15/2011	7:46:02 PM	H2 MFC set to  0.000000
7/15/2011	7:46:02 PM	BCl3 MFC set to  0.000000
7/15/2011	7:46:02 PM	PHl3 MFC set to  0.000000
7/15/2011	7:46:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:46:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:46:02 PM	Tube furnace set to 0
7/15/2011	7:46:03 PM	Run finished at 7:46 PM
7/15/2011	7:46:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	7:49:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	7:49:47 PM	Recipe started at 7:49 PM
7/15/2011	7:49:47 PM	Helium valve closed
7/15/2011	7:49:47 PM	H2 valve closed
7/15/2011	7:49:47 PM	BCl3 valve closed
7/15/2011	7:49:47 PM	PH3 valve closed
7/15/2011	7:49:47 PM	SiCl4 pre valve closed
7/15/2011	7:49:47 PM	SiCl4 post valve closed
7/15/2011	7:49:47 PM	Main Vac valve closed
7/15/2011	7:49:47 PM	Bubbler valve closed
7/15/2011	7:49:47 PM	Bypass valve opened
7/15/2011	7:49:47 PM	Helium MFC set to  0.000000
7/15/2011	7:49:47 PM	H2 MFC set to  0.000000
7/15/2011	7:49:47 PM	BCl3 MFC set to  0.000000
7/15/2011	7:49:47 PM	PHl3 MFC set to  0.000000
7/15/2011	7:49:47 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:49:47 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:49:47 PM	Tube furnace set to 0
7/15/2011	7:50:46 PM	Helium valve closed
7/15/2011	7:50:46 PM	H2 valve closed
7/15/2011	7:50:46 PM	BCl3 valve closed
7/15/2011	7:50:46 PM	PH3 valve closed
7/15/2011	7:50:46 PM	SiCl4 pre valve closed
7/15/2011	7:50:46 PM	SiCl4 post valve closed
7/15/2011	7:50:46 PM	Main Vac valve closed
7/15/2011	7:50:46 PM	Bubbler valve closed
7/15/2011	7:50:46 PM	Bypass valve opened
7/15/2011	7:50:46 PM	Helium MFC set to  0.000000
7/15/2011	7:50:46 PM	H2 MFC set to  0.000000
7/15/2011	7:50:46 PM	BCl3 MFC set to  0.000000
7/15/2011	7:50:46 PM	PHl3 MFC set to  0.000000
7/15/2011	7:50:46 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:50:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:50:46 PM	Tube furnace set to 0
7/15/2011	7:51:46 PM	Helium valve closed
7/15/2011	7:51:46 PM	H2 valve closed
7/15/2011	7:51:46 PM	BCl3 valve closed
7/15/2011	7:51:46 PM	PH3 valve closed
7/15/2011	7:51:46 PM	SiCl4 pre valve closed
7/15/2011	7:51:46 PM	SiCl4 post valve closed
7/15/2011	7:51:46 PM	Bypass valve closed
7/15/2011	7:51:46 PM	Bubbler valve closed
7/15/2011	7:51:46 PM	Main Vac valve opened
7/15/2011	7:51:46 PM	Helium MFC set to  0.000000
7/15/2011	7:51:46 PM	H2 MFC set to  0.000000
7/15/2011	7:51:46 PM	BCl3 MFC set to  0.000000
7/15/2011	7:51:46 PM	PHl3 MFC set to  0.000000
7/15/2011	7:51:46 PM	SiCl4 MFC set to  0.000000
7/15/2011	7:51:46 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	7:51:46 PM	Tube furnace set to 0
7/15/2011	7:51:47 PM	Run finished at 7:51 PM
7/15/2011	7:51:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	7:52:00 PM	Helium MFC set to  20.000000
7/15/2011	7:52:49 PM	Helium valve opened
7/15/2011	7:54:27 PM	Helium valve closed
7/15/2011	7:55:13 PM	Helium valve opened
7/15/2011	7:56:44 PM	Helium valve closed
7/15/2011	7:57:48 PM	Main Vac valve closed
7/15/2011	7:57:55 PM	Main Vac valve opened
7/15/2011	8:00:20 PM	Main Vac valve closed
7/15/2011	8:00:25 PM	Main Vac valve opened
7/15/2011	8:09:46 PM	Helium valve opened
7/15/2011	8:15:07 PM	Helium valve closed
7/15/2011	8:15:11 PM	Helium MFC set to  0.000000
7/15/2011	8:16:28 PM	Main Vac valve closed
7/15/2011	8:16:36 PM	Main Vac valve opened
7/15/2011	8:16:49 PM	Recipe started at 8:16 PM
7/15/2011	8:16:49 PM	Helium valve closed
7/15/2011	8:16:49 PM	H2 valve closed
7/15/2011	8:16:49 PM	BCl3 valve closed
7/15/2011	8:16:49 PM	PH3 valve closed
7/15/2011	8:16:49 PM	SiCl4 pre valve closed
7/15/2011	8:16:49 PM	SiCl4 post valve closed
7/15/2011	8:16:49 PM	Main Vac valve closed
7/15/2011	8:16:49 PM	Bypass valve closed
7/15/2011	8:16:49 PM	Bubbler valve closed
7/15/2011	8:16:49 PM	Helium MFC set to  0.000000
7/15/2011	8:16:49 PM	H2 MFC set to  0.000000
7/15/2011	8:16:49 PM	BCl3 MFC set to  0.000000
7/15/2011	8:16:49 PM	PHl3 MFC set to  0.000000
7/15/2011	8:16:49 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:16:49 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:16:49 PM	Tube furnace set to 0
7/15/2011	8:16:52 PM	Helium valve closed
7/15/2011	8:16:52 PM	BCl3 valve closed
7/15/2011	8:16:52 PM	PH3 valve closed
7/15/2011	8:16:52 PM	SiCl4 pre valve closed
7/15/2011	8:16:52 PM	SiCl4 post valve closed
7/15/2011	8:16:52 PM	Main Vac valve closed
7/15/2011	8:16:52 PM	Bypass valve closed
7/15/2011	8:16:52 PM	Bubbler valve closed
7/15/2011	8:16:52 PM	H2 valve opened
7/15/2011	8:16:52 PM	Helium MFC set to  0.000000
7/15/2011	8:16:52 PM	H2 MFC set to  500.000000
7/15/2011	8:16:52 PM	BCl3 MFC set to  0.000000
7/15/2011	8:16:52 PM	PHl3 MFC set to  0.000000
7/15/2011	8:16:52 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:16:52 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:16:52 PM	Tube furnace set to 0
7/15/2011	8:17:55 PM	Helium valve closed
7/15/2011	8:17:55 PM	BCl3 valve closed
7/15/2011	8:17:55 PM	PH3 valve closed
7/15/2011	8:17:55 PM	SiCl4 pre valve closed
7/15/2011	8:17:55 PM	SiCl4 post valve closed
7/15/2011	8:17:55 PM	Main Vac valve closed
7/15/2011	8:17:55 PM	Bypass valve closed
7/15/2011	8:17:55 PM	H2 valve opened
7/15/2011	8:17:55 PM	Bubbler valve opened
7/15/2011	8:17:55 PM	Helium MFC set to  0.000000
7/15/2011	8:17:55 PM	H2 MFC set to  500.000000
7/15/2011	8:17:55 PM	BCl3 MFC set to  0.000000
7/15/2011	8:17:55 PM	PHl3 MFC set to  0.000000
7/15/2011	8:17:55 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:17:55 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:17:55 PM	Tube furnace set to 0
7/15/2011	8:17:56 PM	Helium valve closed
7/15/2011	8:17:56 PM	BCl3 valve closed
7/15/2011	8:17:56 PM	PH3 valve closed
7/15/2011	8:17:56 PM	SiCl4 pre valve closed
7/15/2011	8:17:56 PM	SiCl4 post valve closed
7/15/2011	8:17:56 PM	Main Vac valve closed
7/15/2011	8:17:56 PM	Bypass valve closed
7/15/2011	8:17:56 PM	H2 valve opened
7/15/2011	8:17:56 PM	Bubbler valve opened
7/15/2011	8:17:56 PM	Helium MFC set to  0.000000
7/15/2011	8:17:56 PM	H2 MFC set to  500.000000
7/15/2011	8:17:56 PM	BCl3 MFC set to  0.000000
7/15/2011	8:17:56 PM	PHl3 MFC set to  0.000000
7/15/2011	8:17:56 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:17:56 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:17:56 PM	Tube furnace set to 1000
7/15/2011	8:37:56 PM	Helium valve closed
7/15/2011	8:37:56 PM	BCl3 valve closed
7/15/2011	8:37:56 PM	PH3 valve closed
7/15/2011	8:37:56 PM	Main Vac valve closed
7/15/2011	8:37:56 PM	Bypass valve closed
7/15/2011	8:37:56 PM	H2 valve opened
7/15/2011	8:37:56 PM	SiCl4 pre valve opened
7/15/2011	8:37:56 PM	SiCl4 post valve opened
7/15/2011	8:37:56 PM	Bubbler valve opened
7/15/2011	8:37:56 PM	Helium MFC set to  0.000000
7/15/2011	8:37:56 PM	H2 MFC set to  500.000000
7/15/2011	8:37:56 PM	BCl3 MFC set to  0.000000
7/15/2011	8:37:56 PM	PHl3 MFC set to  0.000000
7/15/2011	8:37:56 PM	SiCl4 MFC set to  50.000000
7/15/2011	8:37:56 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:37:56 PM	Tube furnace set to 1000
7/15/2011	8:51:56 PM	Helium valve closed
7/15/2011	8:51:56 PM	BCl3 valve closed
7/15/2011	8:51:56 PM	PH3 valve closed
7/15/2011	8:51:56 PM	SiCl4 pre valve closed
7/15/2011	8:51:56 PM	SiCl4 post valve closed
7/15/2011	8:51:56 PM	Main Vac valve closed
7/15/2011	8:51:56 PM	Bypass valve closed
7/15/2011	8:51:56 PM	H2 valve opened
7/15/2011	8:51:56 PM	Bubbler valve opened
7/15/2011	8:51:56 PM	Helium MFC set to  0.000000
7/15/2011	8:51:56 PM	H2 MFC set to  500.000000
7/15/2011	8:51:56 PM	BCl3 MFC set to  0.000000
7/15/2011	8:51:56 PM	PHl3 MFC set to  0.000000
7/15/2011	8:51:56 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:51:56 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:51:56 PM	Tube furnace set to 950
7/15/2011	8:53:56 PM	Helium valve closed
7/15/2011	8:53:56 PM	BCl3 valve closed
7/15/2011	8:53:56 PM	PH3 valve closed
7/15/2011	8:53:56 PM	SiCl4 pre valve closed
7/15/2011	8:53:56 PM	SiCl4 post valve closed
7/15/2011	8:53:56 PM	Main Vac valve closed
7/15/2011	8:53:56 PM	Bypass valve closed
7/15/2011	8:53:56 PM	H2 valve opened
7/15/2011	8:53:56 PM	Bubbler valve opened
7/15/2011	8:53:56 PM	Helium MFC set to  0.000000
7/15/2011	8:53:56 PM	H2 MFC set to  500.000000
7/15/2011	8:53:56 PM	BCl3 MFC set to  0.000000
7/15/2011	8:53:56 PM	PHl3 MFC set to  0.000000
7/15/2011	8:53:56 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:53:56 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:53:56 PM	Tube furnace set to 900
7/15/2011	8:55:56 PM	Helium valve closed
7/15/2011	8:55:57 PM	BCl3 valve closed
7/15/2011	8:55:57 PM	PH3 valve closed
7/15/2011	8:55:57 PM	SiCl4 pre valve closed
7/15/2011	8:55:57 PM	SiCl4 post valve closed
7/15/2011	8:55:57 PM	Main Vac valve closed
7/15/2011	8:55:57 PM	Bypass valve closed
7/15/2011	8:55:57 PM	H2 valve opened
7/15/2011	8:55:57 PM	Bubbler valve opened
7/15/2011	8:55:57 PM	Helium MFC set to  0.000000
7/15/2011	8:55:57 PM	H2 MFC set to  500.000000
7/15/2011	8:55:57 PM	BCl3 MFC set to  0.000000
7/15/2011	8:55:57 PM	PHl3 MFC set to  0.000000
7/15/2011	8:55:57 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:55:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:55:57 PM	Tube furnace set to 850
7/15/2011	8:57:57 PM	H2 valve closed
7/15/2011	8:57:57 PM	BCl3 valve closed
7/15/2011	8:57:57 PM	PH3 valve closed
7/15/2011	8:57:57 PM	SiCl4 pre valve closed
7/15/2011	8:57:57 PM	SiCl4 post valve closed
7/15/2011	8:57:57 PM	Main Vac valve closed
7/15/2011	8:57:57 PM	Bypass valve closed
7/15/2011	8:57:57 PM	Helium valve opened
7/15/2011	8:57:57 PM	Bubbler valve opened
7/15/2011	8:57:57 PM	Helium MFC set to  500.000000
7/15/2011	8:57:57 PM	H2 MFC set to  0.000000
7/15/2011	8:57:57 PM	BCl3 MFC set to  0.000000
7/15/2011	8:57:57 PM	PHl3 MFC set to  0.000000
7/15/2011	8:57:57 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:57:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:57:57 PM	Tube furnace set to 800
7/15/2011	8:59:57 PM	H2 valve closed
7/15/2011	8:59:57 PM	BCl3 valve closed
7/15/2011	8:59:57 PM	PH3 valve closed
7/15/2011	8:59:57 PM	SiCl4 pre valve closed
7/15/2011	8:59:57 PM	SiCl4 post valve closed
7/15/2011	8:59:57 PM	Main Vac valve closed
7/15/2011	8:59:57 PM	Bypass valve closed
7/15/2011	8:59:57 PM	Helium valve opened
7/15/2011	8:59:57 PM	Bubbler valve opened
7/15/2011	8:59:57 PM	Helium MFC set to  500.000000
7/15/2011	8:59:57 PM	H2 MFC set to  0.000000
7/15/2011	8:59:57 PM	BCl3 MFC set to  0.000000
7/15/2011	8:59:57 PM	PHl3 MFC set to  0.000000
7/15/2011	8:59:57 PM	SiCl4 MFC set to  0.000000
7/15/2011	8:59:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	8:59:57 PM	Tube furnace set to 750
7/15/2011	9:01:57 PM	H2 valve closed
7/15/2011	9:01:57 PM	BCl3 valve closed
7/15/2011	9:01:57 PM	PH3 valve closed
7/15/2011	9:01:57 PM	SiCl4 pre valve closed
7/15/2011	9:01:57 PM	SiCl4 post valve closed
7/15/2011	9:01:57 PM	Main Vac valve closed
7/15/2011	9:01:57 PM	Bypass valve closed
7/15/2011	9:01:57 PM	Helium valve opened
7/15/2011	9:01:57 PM	Bubbler valve opened
7/15/2011	9:01:57 PM	Helium MFC set to  500.000000
7/15/2011	9:01:57 PM	H2 MFC set to  0.000000
7/15/2011	9:01:57 PM	BCl3 MFC set to  0.000000
7/15/2011	9:01:57 PM	PHl3 MFC set to  0.000000
7/15/2011	9:01:57 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:01:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:01:57 PM	Tube furnace set to 0
7/15/2011	9:21:57 PM	Helium valve closed
7/15/2011	9:21:57 PM	H2 valve closed
7/15/2011	9:21:57 PM	BCl3 valve closed
7/15/2011	9:21:57 PM	PH3 valve closed
7/15/2011	9:21:57 PM	SiCl4 pre valve closed
7/15/2011	9:21:57 PM	SiCl4 post valve closed
7/15/2011	9:21:57 PM	Main Vac valve closed
7/15/2011	9:21:57 PM	Bypass valve closed
7/15/2011	9:21:57 PM	Bubbler valve closed
7/15/2011	9:21:57 PM	Helium MFC set to  0.000000
7/15/2011	9:21:57 PM	H2 MFC set to  0.000000
7/15/2011	9:21:57 PM	BCl3 MFC set to  0.000000
7/15/2011	9:21:57 PM	PHl3 MFC set to  0.000000
7/15/2011	9:21:57 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:21:57 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:21:57 PM	Tube furnace set to 0
7/15/2011	9:21:58 PM	Run finished at 9:21 PM
7/15/2011	9:47:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	9:47:51 PM	Recipe started at 9:47 PM
7/15/2011	9:47:51 PM	Helium valve closed
7/15/2011	9:47:51 PM	H2 valve closed
7/15/2011	9:47:51 PM	BCl3 valve closed
7/15/2011	9:47:51 PM	PH3 valve closed
7/15/2011	9:47:51 PM	SiCl4 pre valve closed
7/15/2011	9:47:51 PM	SiCl4 post valve closed
7/15/2011	9:47:51 PM	Main Vac valve closed
7/15/2011	9:47:51 PM	Bypass valve closed
7/15/2011	9:47:51 PM	Bubbler valve closed
7/15/2011	9:47:51 PM	Helium MFC set to  0.000000
7/15/2011	9:47:51 PM	H2 MFC set to  0.000000
7/15/2011	9:47:51 PM	BCl3 MFC set to  0.000000
7/15/2011	9:47:51 PM	PHl3 MFC set to  0.000000
7/15/2011	9:47:51 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:47:51 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:47:51 PM	Tube furnace set to 0
7/15/2011	9:47:54 PM	H2 valve closed
7/15/2011	9:47:54 PM	BCl3 valve closed
7/15/2011	9:47:54 PM	PH3 valve closed
7/15/2011	9:47:54 PM	SiCl4 pre valve closed
7/15/2011	9:47:54 PM	SiCl4 post valve closed
7/15/2011	9:47:54 PM	Main Vac valve closed
7/15/2011	9:47:54 PM	Bypass valve closed
7/15/2011	9:47:54 PM	Bubbler valve closed
7/15/2011	9:47:54 PM	Helium valve opened
7/15/2011	9:47:54 PM	Helium MFC set to  500.000000
7/15/2011	9:47:54 PM	H2 MFC set to  0.000000
7/15/2011	9:47:54 PM	BCl3 MFC set to  0.000000
7/15/2011	9:47:54 PM	PHl3 MFC set to  0.000000
7/15/2011	9:47:54 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:47:54 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:47:54 PM	Tube furnace set to 0
7/15/2011	9:47:59 PM	Helium valve closed
7/15/2011	9:47:59 PM	H2 valve closed
7/15/2011	9:47:59 PM	BCl3 valve closed
7/15/2011	9:47:59 PM	PH3 valve closed
7/15/2011	9:47:59 PM	SiCl4 pre valve closed
7/15/2011	9:47:59 PM	SiCl4 post valve closed
7/15/2011	9:47:59 PM	Main Vac valve closed
7/15/2011	9:47:59 PM	Bypass valve closed
7/15/2011	9:47:59 PM	Bubbler valve closed
7/15/2011	9:47:59 PM	Helium MFC set to  0.000000
7/15/2011	9:47:59 PM	H2 MFC set to  0.000000
7/15/2011	9:47:59 PM	BCl3 MFC set to  0.000000
7/15/2011	9:47:59 PM	PHl3 MFC set to  0.000000
7/15/2011	9:47:59 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:47:59 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:47:59 PM	Tube furnace set to 0
7/15/2011	9:48:00 PM	Run finished at 9:48 PM
7/15/2011	9:48:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	9:52:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	9:52:02 PM	Recipe started at 9:52 PM
7/15/2011	9:52:02 PM	Helium valve closed
7/15/2011	9:52:02 PM	H2 valve closed
7/15/2011	9:52:02 PM	BCl3 valve closed
7/15/2011	9:52:02 PM	PH3 valve closed
7/15/2011	9:52:02 PM	SiCl4 pre valve closed
7/15/2011	9:52:02 PM	SiCl4 post valve closed
7/15/2011	9:52:02 PM	Main Vac valve closed
7/15/2011	9:52:02 PM	Bubbler valve closed
7/15/2011	9:52:02 PM	Bypass valve opened
7/15/2011	9:52:02 PM	Helium MFC set to  0.000000
7/15/2011	9:52:02 PM	H2 MFC set to  0.000000
7/15/2011	9:52:02 PM	BCl3 MFC set to  0.000000
7/15/2011	9:52:02 PM	PHl3 MFC set to  0.000000
7/15/2011	9:52:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:52:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:52:02 PM	Tube furnace set to 0
7/15/2011	9:53:00 PM	Helium valve closed
7/15/2011	9:53:00 PM	H2 valve closed
7/15/2011	9:53:00 PM	BCl3 valve closed
7/15/2011	9:53:00 PM	PH3 valve closed
7/15/2011	9:53:00 PM	SiCl4 pre valve closed
7/15/2011	9:53:00 PM	SiCl4 post valve closed
7/15/2011	9:53:00 PM	Main Vac valve closed
7/15/2011	9:53:00 PM	Bubbler valve closed
7/15/2011	9:53:00 PM	Bypass valve opened
7/15/2011	9:53:00 PM	Helium MFC set to  0.000000
7/15/2011	9:53:00 PM	H2 MFC set to  0.000000
7/15/2011	9:53:00 PM	BCl3 MFC set to  0.000000
7/15/2011	9:53:00 PM	PHl3 MFC set to  0.000000
7/15/2011	9:53:00 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:53:00 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:53:00 PM	Tube furnace set to 0
7/15/2011	9:54:01 PM	Helium valve closed
7/15/2011	9:54:01 PM	H2 valve closed
7/15/2011	9:54:01 PM	BCl3 valve closed
7/15/2011	9:54:01 PM	PH3 valve closed
7/15/2011	9:54:01 PM	SiCl4 pre valve closed
7/15/2011	9:54:01 PM	SiCl4 post valve closed
7/15/2011	9:54:01 PM	Bypass valve closed
7/15/2011	9:54:01 PM	Bubbler valve closed
7/15/2011	9:54:01 PM	Main Vac valve opened
7/15/2011	9:54:01 PM	Helium MFC set to  0.000000
7/15/2011	9:54:01 PM	H2 MFC set to  0.000000
7/15/2011	9:54:01 PM	BCl3 MFC set to  0.000000
7/15/2011	9:54:01 PM	PHl3 MFC set to  0.000000
7/15/2011	9:54:01 PM	SiCl4 MFC set to  0.000000
7/15/2011	9:54:01 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	9:54:01 PM	Tube furnace set to 0
7/15/2011	9:54:02 PM	Run finished at 9:54 PM
7/15/2011	9:54:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	10:08:53 PM	Main Vac valve closed
7/15/2011	10:08:58 PM	Main Vac valve opened
7/15/2011	10:09:05 PM	Helium MFC set to  20.000000
7/15/2011	10:09:06 PM	Helium valve opened
7/15/2011	10:21:10 PM	Helium valve closed
7/15/2011	10:21:44 PM	Main Vac valve closed
7/15/2011	10:21:51 PM	Main Vac valve opened
7/15/2011	10:22:15 PM	Recipe started at 10:22 PM
7/15/2011	10:22:15 PM	Helium valve closed
7/15/2011	10:22:15 PM	H2 valve closed
7/15/2011	10:22:15 PM	BCl3 valve closed
7/15/2011	10:22:15 PM	PH3 valve closed
7/15/2011	10:22:15 PM	SiCl4 pre valve closed
7/15/2011	10:22:15 PM	SiCl4 post valve closed
7/15/2011	10:22:15 PM	Main Vac valve closed
7/15/2011	10:22:15 PM	Bypass valve closed
7/15/2011	10:22:15 PM	Bubbler valve closed
7/15/2011	10:22:15 PM	Helium MFC set to  0.000000
7/15/2011	10:22:15 PM	H2 MFC set to  0.000000
7/15/2011	10:22:15 PM	BCl3 MFC set to  0.000000
7/15/2011	10:22:15 PM	PHl3 MFC set to  0.000000
7/15/2011	10:22:15 PM	SiCl4 MFC set to  0.000000
7/15/2011	10:22:15 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:22:15 PM	Tube furnace set to 0
7/15/2011	10:22:18 PM	Helium valve closed
7/15/2011	10:22:18 PM	BCl3 valve closed
7/15/2011	10:22:18 PM	PH3 valve closed
7/15/2011	10:22:18 PM	SiCl4 pre valve closed
7/15/2011	10:22:18 PM	SiCl4 post valve closed
7/15/2011	10:22:18 PM	Main Vac valve closed
7/15/2011	10:22:18 PM	Bypass valve closed
7/15/2011	10:22:18 PM	Bubbler valve closed
7/15/2011	10:22:18 PM	H2 valve opened
7/15/2011	10:22:18 PM	Helium MFC set to  0.000000
7/15/2011	10:22:18 PM	H2 MFC set to  500.000000
7/15/2011	10:22:18 PM	BCl3 MFC set to  0.000000
7/15/2011	10:22:18 PM	PHl3 MFC set to  0.000000
7/15/2011	10:22:18 PM	SiCl4 MFC set to  0.000000
7/15/2011	10:22:18 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:22:18 PM	Tube furnace set to 0
7/15/2011	10:23:21 PM	Helium valve closed
7/15/2011	10:23:21 PM	BCl3 valve closed
7/15/2011	10:23:21 PM	PH3 valve closed
7/15/2011	10:23:21 PM	SiCl4 pre valve closed
7/15/2011	10:23:21 PM	SiCl4 post valve closed
7/15/2011	10:23:21 PM	Main Vac valve closed
7/15/2011	10:23:21 PM	Bypass valve closed
7/15/2011	10:23:21 PM	H2 valve opened
7/15/2011	10:23:21 PM	Bubbler valve opened
7/15/2011	10:23:21 PM	Helium MFC set to  0.000000
7/15/2011	10:23:21 PM	H2 MFC set to  500.000000
7/15/2011	10:23:21 PM	BCl3 MFC set to  0.000000
7/15/2011	10:23:21 PM	PHl3 MFC set to  0.000000
7/15/2011	10:23:21 PM	SiCl4 MFC set to  0.000000
7/15/2011	10:23:21 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:23:21 PM	Tube furnace set to 0
7/15/2011	10:23:22 PM	Helium valve closed
7/15/2011	10:23:22 PM	BCl3 valve closed
7/15/2011	10:23:22 PM	PH3 valve closed
7/15/2011	10:23:22 PM	SiCl4 pre valve closed
7/15/2011	10:23:22 PM	SiCl4 post valve closed
7/15/2011	10:23:22 PM	Main Vac valve closed
7/15/2011	10:23:22 PM	Bypass valve closed
7/15/2011	10:23:22 PM	H2 valve opened
7/15/2011	10:23:22 PM	Bubbler valve opened
7/15/2011	10:23:22 PM	Helium MFC set to  0.000000
7/15/2011	10:23:22 PM	H2 MFC set to  500.000000
7/15/2011	10:23:22 PM	BCl3 MFC set to  0.000000
7/15/2011	10:23:22 PM	PHl3 MFC set to  0.000000
7/15/2011	10:23:22 PM	SiCl4 MFC set to  0.000000
7/15/2011	10:23:22 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:23:22 PM	Tube furnace set to 1000
7/15/2011	10:43:22 PM	Helium valve closed
7/15/2011	10:43:22 PM	BCl3 valve closed
7/15/2011	10:43:22 PM	Main Vac valve closed
7/15/2011	10:43:22 PM	Bypass valve closed
7/15/2011	10:43:22 PM	H2 valve opened
7/15/2011	10:43:22 PM	PH3 valve opened
7/15/2011	10:43:22 PM	SiCl4 pre valve opened
7/15/2011	10:43:22 PM	SiCl4 post valve opened
7/15/2011	10:43:22 PM	Bubbler valve opened
7/15/2011	10:43:22 PM	Helium MFC set to  0.000000
7/15/2011	10:43:22 PM	H2 MFC set to  500.000000
7/15/2011	10:43:22 PM	BCl3 MFC set to  0.000000
7/15/2011	10:43:22 PM	PHl3 MFC set to  1.000000
7/15/2011	10:43:22 PM	SiCl4 MFC set to  50.000000
7/15/2011	10:43:22 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:43:23 PM	Tube furnace set to 1000
7/15/2011	10:57:23 PM	Helium valve closed
7/15/2011	10:57:23 PM	BCl3 valve closed
7/15/2011	10:57:23 PM	PH3 valve closed
7/15/2011	10:57:23 PM	SiCl4 pre valve closed
7/15/2011	10:57:23 PM	SiCl4 post valve closed
7/15/2011	10:57:23 PM	Main Vac valve closed
7/15/2011	10:57:23 PM	Bypass valve closed
7/15/2011	10:57:23 PM	H2 valve opened
7/15/2011	10:57:23 PM	Bubbler valve opened
7/15/2011	10:57:23 PM	Helium MFC set to  0.000000
7/15/2011	10:57:23 PM	H2 MFC set to  500.000000
7/15/2011	10:57:23 PM	BCl3 MFC set to  0.000000
7/15/2011	10:57:23 PM	PHl3 MFC set to  0.000000
7/15/2011	10:57:23 PM	SiCl4 MFC set to  0.000000
7/15/2011	10:57:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:57:23 PM	Tube furnace set to 950
7/15/2011	10:59:23 PM	Helium valve closed
7/15/2011	10:59:23 PM	BCl3 valve closed
7/15/2011	10:59:23 PM	PH3 valve closed
7/15/2011	10:59:23 PM	SiCl4 pre valve closed
7/15/2011	10:59:23 PM	SiCl4 post valve closed
7/15/2011	10:59:23 PM	Main Vac valve closed
7/15/2011	10:59:23 PM	Bypass valve closed
7/15/2011	10:59:23 PM	H2 valve opened
7/15/2011	10:59:23 PM	Bubbler valve opened
7/15/2011	10:59:23 PM	Helium MFC set to  0.000000
7/15/2011	10:59:23 PM	H2 MFC set to  500.000000
7/15/2011	10:59:23 PM	BCl3 MFC set to  0.000000
7/15/2011	10:59:23 PM	PHl3 MFC set to  0.000000
7/15/2011	10:59:23 PM	SiCl4 MFC set to  0.000000
7/15/2011	10:59:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	10:59:23 PM	Tube furnace set to 900
7/15/2011	11:01:23 PM	Helium valve closed
7/15/2011	11:01:23 PM	BCl3 valve closed
7/15/2011	11:01:23 PM	PH3 valve closed
7/15/2011	11:01:23 PM	SiCl4 pre valve closed
7/15/2011	11:01:23 PM	SiCl4 post valve closed
7/15/2011	11:01:23 PM	Main Vac valve closed
7/15/2011	11:01:23 PM	Bypass valve closed
7/15/2011	11:01:23 PM	H2 valve opened
7/15/2011	11:01:23 PM	Bubbler valve opened
7/15/2011	11:01:23 PM	Helium MFC set to  0.000000
7/15/2011	11:01:23 PM	H2 MFC set to  500.000000
7/15/2011	11:01:23 PM	BCl3 MFC set to  0.000000
7/15/2011	11:01:23 PM	PHl3 MFC set to  0.000000
7/15/2011	11:01:23 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:01:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:01:23 PM	Tube furnace set to 850
7/15/2011	11:03:23 PM	H2 valve closed
7/15/2011	11:03:23 PM	BCl3 valve closed
7/15/2011	11:03:23 PM	PH3 valve closed
7/15/2011	11:03:23 PM	SiCl4 pre valve closed
7/15/2011	11:03:23 PM	SiCl4 post valve closed
7/15/2011	11:03:23 PM	Main Vac valve closed
7/15/2011	11:03:23 PM	Bypass valve closed
7/15/2011	11:03:23 PM	Helium valve opened
7/15/2011	11:03:23 PM	Bubbler valve opened
7/15/2011	11:03:23 PM	Helium MFC set to  500.000000
7/15/2011	11:03:23 PM	H2 MFC set to  0.000000
7/15/2011	11:03:23 PM	BCl3 MFC set to  0.000000
7/15/2011	11:03:23 PM	PHl3 MFC set to  0.000000
7/15/2011	11:03:23 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:03:23 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:03:23 PM	Tube furnace set to 800
7/15/2011	11:05:23 PM	H2 valve closed
7/15/2011	11:05:23 PM	BCl3 valve closed
7/15/2011	11:05:23 PM	PH3 valve closed
7/15/2011	11:05:23 PM	SiCl4 pre valve closed
7/15/2011	11:05:23 PM	SiCl4 post valve closed
7/15/2011	11:05:23 PM	Main Vac valve closed
7/15/2011	11:05:23 PM	Bypass valve closed
7/15/2011	11:05:23 PM	Helium valve opened
7/15/2011	11:05:23 PM	Bubbler valve opened
7/15/2011	11:05:23 PM	Helium MFC set to  500.000000
7/15/2011	11:05:23 PM	H2 MFC set to  0.000000
7/15/2011	11:05:24 PM	BCl3 MFC set to  0.000000
7/15/2011	11:05:24 PM	PHl3 MFC set to  0.000000
7/15/2011	11:05:24 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:05:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:05:24 PM	Tube furnace set to 750
7/15/2011	11:07:24 PM	H2 valve closed
7/15/2011	11:07:24 PM	BCl3 valve closed
7/15/2011	11:07:24 PM	PH3 valve closed
7/15/2011	11:07:24 PM	SiCl4 pre valve closed
7/15/2011	11:07:24 PM	SiCl4 post valve closed
7/15/2011	11:07:24 PM	Main Vac valve closed
7/15/2011	11:07:24 PM	Bypass valve closed
7/15/2011	11:07:24 PM	Helium valve opened
7/15/2011	11:07:24 PM	Bubbler valve opened
7/15/2011	11:07:24 PM	Helium MFC set to  500.000000
7/15/2011	11:07:24 PM	H2 MFC set to  0.000000
7/15/2011	11:07:24 PM	BCl3 MFC set to  0.000000
7/15/2011	11:07:24 PM	PHl3 MFC set to  0.000000
7/15/2011	11:07:24 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:07:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:07:24 PM	Tube furnace set to 0
7/15/2011	11:27:24 PM	Helium valve closed
7/15/2011	11:27:24 PM	H2 valve closed
7/15/2011	11:27:24 PM	BCl3 valve closed
7/15/2011	11:27:24 PM	PH3 valve closed
7/15/2011	11:27:24 PM	SiCl4 pre valve closed
7/15/2011	11:27:24 PM	SiCl4 post valve closed
7/15/2011	11:27:24 PM	Main Vac valve closed
7/15/2011	11:27:24 PM	Bypass valve closed
7/15/2011	11:27:24 PM	Bubbler valve closed
7/15/2011	11:27:24 PM	Helium MFC set to  0.000000
7/15/2011	11:27:24 PM	H2 MFC set to  0.000000
7/15/2011	11:27:24 PM	BCl3 MFC set to  0.000000
7/15/2011	11:27:24 PM	PHl3 MFC set to  0.000000
7/15/2011	11:27:24 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:27:24 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:27:24 PM	Tube furnace set to 0
7/15/2011	11:27:25 PM	Run finished at 11:27 PM
7/15/2011	11:29:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	11:29:58 PM	Recipe started at 11:29 PM
7/15/2011	11:29:58 PM	Helium valve closed
7/15/2011	11:29:58 PM	H2 valve closed
7/15/2011	11:29:58 PM	BCl3 valve closed
7/15/2011	11:29:58 PM	PH3 valve closed
7/15/2011	11:29:58 PM	SiCl4 pre valve closed
7/15/2011	11:29:58 PM	SiCl4 post valve closed
7/15/2011	11:29:58 PM	Main Vac valve closed
7/15/2011	11:29:58 PM	Bypass valve closed
7/15/2011	11:29:58 PM	Bubbler valve closed
7/15/2011	11:29:58 PM	Helium MFC set to  0.000000
7/15/2011	11:29:58 PM	H2 MFC set to  0.000000
7/15/2011	11:29:58 PM	BCl3 MFC set to  0.000000
7/15/2011	11:29:58 PM	PHl3 MFC set to  0.000000
7/15/2011	11:29:58 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:29:58 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:29:59 PM	Tube furnace set to 0
7/15/2011	11:30:02 PM	H2 valve closed
7/15/2011	11:30:02 PM	BCl3 valve closed
7/15/2011	11:30:02 PM	PH3 valve closed
7/15/2011	11:30:02 PM	SiCl4 pre valve closed
7/15/2011	11:30:02 PM	SiCl4 post valve closed
7/15/2011	11:30:02 PM	Main Vac valve closed
7/15/2011	11:30:02 PM	Bypass valve closed
7/15/2011	11:30:02 PM	Bubbler valve closed
7/15/2011	11:30:02 PM	Helium valve opened
7/15/2011	11:30:02 PM	Helium MFC set to  500.000000
7/15/2011	11:30:02 PM	H2 MFC set to  0.000000
7/15/2011	11:30:02 PM	BCl3 MFC set to  0.000000
7/15/2011	11:30:02 PM	PHl3 MFC set to  0.000000
7/15/2011	11:30:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:30:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:30:02 PM	Tube furnace set to 0
7/15/2011	11:30:02 PM	Helium valve closed
7/15/2011	11:30:02 PM	H2 valve closed
7/15/2011	11:30:02 PM	BCl3 valve closed
7/15/2011	11:30:02 PM	PH3 valve closed
7/15/2011	11:30:02 PM	SiCl4 pre valve closed
7/15/2011	11:30:02 PM	SiCl4 post valve closed
7/15/2011	11:30:02 PM	Main Vac valve closed
7/15/2011	11:30:02 PM	Bypass valve closed
7/15/2011	11:30:02 PM	Bubbler valve closed
7/15/2011	11:30:02 PM	Helium MFC set to  0.000000
7/15/2011	11:30:02 PM	H2 MFC set to  0.000000
7/15/2011	11:30:02 PM	BCl3 MFC set to  0.000000
7/15/2011	11:30:02 PM	PHl3 MFC set to  0.000000
7/15/2011	11:30:02 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:30:02 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:30:02 PM	Tube furnace set to 0
7/15/2011	11:30:03 PM	Run finished at 11:30 PM
7/15/2011	11:30:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/15/2011	11:33:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	11:33:39 PM	Recipe started at 11:33 PM
7/15/2011	11:33:39 PM	Helium valve closed
7/15/2011	11:33:39 PM	H2 valve closed
7/15/2011	11:33:39 PM	BCl3 valve closed
7/15/2011	11:33:39 PM	PH3 valve closed
7/15/2011	11:33:39 PM	SiCl4 pre valve closed
7/15/2011	11:33:39 PM	SiCl4 post valve closed
7/15/2011	11:33:39 PM	Main Vac valve closed
7/15/2011	11:33:39 PM	Bubbler valve closed
7/15/2011	11:33:39 PM	Bypass valve opened
7/15/2011	11:33:39 PM	Helium MFC set to  0.000000
7/15/2011	11:33:39 PM	H2 MFC set to  0.000000
7/15/2011	11:33:39 PM	BCl3 MFC set to  0.000000
7/15/2011	11:33:39 PM	PHl3 MFC set to  0.000000
7/15/2011	11:33:39 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:33:39 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:33:39 PM	Tube furnace set to 0
7/15/2011	11:34:37 PM	Helium valve closed
7/15/2011	11:34:37 PM	H2 valve closed
7/15/2011	11:34:37 PM	BCl3 valve closed
7/15/2011	11:34:37 PM	PH3 valve closed
7/15/2011	11:34:37 PM	SiCl4 pre valve closed
7/15/2011	11:34:37 PM	SiCl4 post valve closed
7/15/2011	11:34:37 PM	Main Vac valve closed
7/15/2011	11:34:37 PM	Bubbler valve closed
7/15/2011	11:34:37 PM	Bypass valve opened
7/15/2011	11:34:37 PM	Helium MFC set to  0.000000
7/15/2011	11:34:37 PM	H2 MFC set to  0.000000
7/15/2011	11:34:37 PM	BCl3 MFC set to  0.000000
7/15/2011	11:34:37 PM	PHl3 MFC set to  0.000000
7/15/2011	11:34:37 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:34:37 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:34:37 PM	Tube furnace set to 0
7/15/2011	11:35:37 PM	Helium valve closed
7/15/2011	11:35:37 PM	H2 valve closed
7/15/2011	11:35:37 PM	BCl3 valve closed
7/15/2011	11:35:37 PM	PH3 valve closed
7/15/2011	11:35:37 PM	SiCl4 pre valve closed
7/15/2011	11:35:37 PM	SiCl4 post valve closed
7/15/2011	11:35:37 PM	Bypass valve closed
7/15/2011	11:35:37 PM	Bubbler valve closed
7/15/2011	11:35:37 PM	Main Vac valve opened
7/15/2011	11:35:37 PM	Helium MFC set to  0.000000
7/15/2011	11:35:37 PM	H2 MFC set to  0.000000
7/15/2011	11:35:37 PM	BCl3 MFC set to  0.000000
7/15/2011	11:35:37 PM	PHl3 MFC set to  0.000000
7/15/2011	11:35:37 PM	SiCl4 MFC set to  0.000000
7/15/2011	11:35:37 PM	Bypass solenoid MFC set to  0.000000
7/15/2011	11:35:38 PM	Tube furnace set to 0
7/15/2011	11:35:39 PM	Run finished at 11:35 PM
7/15/2011	11:35:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/15/2011	11:49:50 PM	Helium MFC set to  20.000000
7/15/2011	11:49:51 PM	Helium valve opened
7/15/2011	11:51:45 PM	Helium valve closed
7/15/2011	11:51:48 PM	Helium MFC set to  0.000000
7/15/2011	11:52:11 PM	Main Vac valve closed
7/15/2011	11:52:16 PM	Main Vac valve opened
7/15/2011	11:52:24 PM	Helium MFC set to  20.000000
